FR2885454B1 - SEMICONDUCTOR DEVICE WITH DIELECTRIC SEPARATION AND METHOD OF MANUFACTURE - Google Patents

SEMICONDUCTOR DEVICE WITH DIELECTRIC SEPARATION AND METHOD OF MANUFACTURE

Info

Publication number
FR2885454B1
FR2885454B1 FR0604059A FR0604059A FR2885454B1 FR 2885454 B1 FR2885454 B1 FR 2885454B1 FR 0604059 A FR0604059 A FR 0604059A FR 0604059 A FR0604059 A FR 0604059A FR 2885454 B1 FR2885454 B1 FR 2885454B1
Authority
FR
France
Prior art keywords
manufacture
semiconductor device
dielectric separation
dielectric
separation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0604059A
Other languages
French (fr)
Other versions
FR2885454A1 (en
Inventor
Hajime Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of FR2885454A1 publication Critical patent/FR2885454A1/en
Priority to FR1356653A priority Critical patent/FR2991503A1/en
Application granted granted Critical
Publication of FR2885454B1 publication Critical patent/FR2885454B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
    • H01L29/7824—Lateral DMOS transistors, i.e. LDMOS transistors with a substrate comprising an insulating layer, e.g. SOI-LDMOS transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05552—Shape in top view
    • H01L2224/05555—Shape in top view being circular or elliptic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05556—Shape in side view
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0642—Isolation within the component, i.e. internal isolation
    • H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
    • H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0843—Source or drain regions of field-effect devices
    • H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
    • H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
    • H01L29/0873—Drain regions
    • H01L29/0886—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/402—Field plates
    • H01L29/405—Resistive arrangements, e.g. resistive or semi-insulating field plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/402—Field plates
    • H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78603—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the insulating substrate or support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1203—Rectifying Diode
    • H01L2924/12036—PN diode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
FR0604059A 2005-05-09 2006-05-05 SEMICONDUCTOR DEVICE WITH DIELECTRIC SEPARATION AND METHOD OF MANUFACTURE Expired - Fee Related FR2885454B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1356653A FR2991503A1 (en) 2005-05-09 2013-07-05 SEMICONDUCTOR DEVICE WITH DIELECTRIC SEPARATION AND METHOD OF MANUFACTURE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005135967A JP4629490B2 (en) 2005-05-09 2005-05-09 Dielectric isolation type semiconductor device

Publications (2)

Publication Number Publication Date
FR2885454A1 FR2885454A1 (en) 2006-11-10
FR2885454B1 true FR2885454B1 (en) 2013-08-16

Family

ID=37137379

Family Applications (2)

Application Number Title Priority Date Filing Date
FR0604059A Expired - Fee Related FR2885454B1 (en) 2005-05-09 2006-05-05 SEMICONDUCTOR DEVICE WITH DIELECTRIC SEPARATION AND METHOD OF MANUFACTURE
FR1356653A Withdrawn FR2991503A1 (en) 2005-05-09 2013-07-05 SEMICONDUCTOR DEVICE WITH DIELECTRIC SEPARATION AND METHOD OF MANUFACTURE

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR1356653A Withdrawn FR2991503A1 (en) 2005-05-09 2013-07-05 SEMICONDUCTOR DEVICE WITH DIELECTRIC SEPARATION AND METHOD OF MANUFACTURE

Country Status (7)

Country Link
US (2) US7485943B2 (en)
JP (1) JP4629490B2 (en)
KR (1) KR100739860B1 (en)
CN (3) CN100477253C (en)
DE (2) DE102006062855B4 (en)
FR (2) FR2885454B1 (en)
TW (1) TWI305058B (en)

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TWI408808B (en) * 2007-10-24 2013-09-11 Chun Chu Yang The structure of the coaxial transistor
US8097921B2 (en) * 2007-11-09 2012-01-17 Denso Corporation Semiconductor device with high-breakdown-voltage transistor
JP5493435B2 (en) 2009-04-08 2014-05-14 富士電機株式会社 High voltage semiconductor device and high voltage integrated circuit device
JP5499915B2 (en) 2009-06-10 2014-05-21 富士電機株式会社 High voltage semiconductor device
JP5458809B2 (en) 2009-11-02 2014-04-02 富士電機株式会社 Semiconductor device
JP5201169B2 (en) * 2010-05-13 2013-06-05 三菱電機株式会社 Method for manufacturing dielectric-separated semiconductor device
JP5610930B2 (en) 2010-08-30 2014-10-22 三菱電機株式会社 Semiconductor device
US8765609B2 (en) 2012-07-25 2014-07-01 Power Integrations, Inc. Deposit/etch for tapered oxide
US9343557B2 (en) * 2013-02-07 2016-05-17 Stmicroelectronics (Tours) Sas Vertical power component
US10280076B2 (en) * 2016-04-15 2019-05-07 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor structure and manufacturing method thereof
JP2020108087A (en) * 2018-12-28 2020-07-09 セイコーエプソン株式会社 Vibration device, electronic apparatus, and movable body
CN112928124B (en) * 2019-12-06 2023-05-26 群创光电股份有限公司 Connection structure and display device comprising same

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JP2860089B2 (en) * 1987-02-26 1999-02-24 株式会社東芝 High voltage semiconductor device
JPH03119733A (en) * 1989-10-02 1991-05-22 Fujitsu Ltd High breakdown-strength semiconductor device
DE4231310C1 (en) 1992-09-18 1994-03-24 Siemens Ag Process for the production of a component with porous silicon
JP2739018B2 (en) * 1992-10-21 1998-04-08 三菱電機株式会社 Dielectric-isolated semiconductor device and method of manufacturing the same
US5445974A (en) 1993-03-31 1995-08-29 Siemens Components, Inc. Method of fabricating a high-voltage, vertical-trench semiconductor device
JPH0945762A (en) 1995-07-26 1997-02-14 Matsushita Electric Works Ltd Semiconductor element substrate and its manufacture
JP3435930B2 (en) 1995-09-28 2003-08-11 株式会社デンソー Semiconductor device and manufacturing method thereof
JPH09205210A (en) * 1996-01-26 1997-08-05 Matsushita Electric Works Ltd Dielectric isolation-type semiconductor device
JPH11191627A (en) * 1997-12-26 1999-07-13 Matsushita Electric Works Ltd Semiconductor device
JP3957417B2 (en) * 1998-11-13 2007-08-15 三菱電機株式会社 SOI high voltage power device
US6750506B2 (en) * 1999-12-17 2004-06-15 Matsushita Electric Industrial Co., Ltd. High-voltage semiconductor device
KR100535062B1 (en) * 2001-06-04 2005-12-07 마츠시타 덴끼 산교 가부시키가이샤 High-voltage semiconductor device
JP2003051609A (en) * 2001-08-03 2003-02-21 Tokyo Gas Co Ltd Ultraviolet light-emitting element with diamond high luminance
US6900501B2 (en) * 2001-11-02 2005-05-31 Cree Microwave, Inc. Silicon on insulator device with improved heat removal
JP4020195B2 (en) 2002-12-19 2007-12-12 三菱電機株式会社 Method for manufacturing dielectric isolation type semiconductor device
JP4420196B2 (en) 2003-12-12 2010-02-24 三菱電機株式会社 Dielectric isolation type semiconductor device and manufacturing method thereof

Also Published As

Publication number Publication date
CN1862826A (en) 2006-11-15
KR100739860B1 (en) 2007-07-16
FR2991503A1 (en) 2013-12-06
US8125045B2 (en) 2012-02-28
DE102006062855B4 (en) 2019-05-16
TWI305058B (en) 2009-01-01
US20060249807A1 (en) 2006-11-09
JP2006313828A (en) 2006-11-16
CN100477253C (en) 2009-04-08
US20090140377A1 (en) 2009-06-04
CN101369603A (en) 2009-02-18
KR20060116149A (en) 2006-11-14
DE102006019950B4 (en) 2012-04-26
CN101369602A (en) 2009-02-18
TW200727497A (en) 2007-07-16
FR2885454A1 (en) 2006-11-10
DE102006019950A1 (en) 2006-11-16
CN101369602B (en) 2011-06-08
JP4629490B2 (en) 2011-02-09
CN101369603B (en) 2010-11-17
US7485943B2 (en) 2009-02-03

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Effective date: 20160129