FR2884969B1 - Integration d'elements capacitifs sous forme de ceramique perovskite - Google Patents

Integration d'elements capacitifs sous forme de ceramique perovskite

Info

Publication number
FR2884969B1
FR2884969B1 FR0551008A FR0551008A FR2884969B1 FR 2884969 B1 FR2884969 B1 FR 2884969B1 FR 0551008 A FR0551008 A FR 0551008A FR 0551008 A FR0551008 A FR 0551008A FR 2884969 B1 FR2884969 B1 FR 2884969B1
Authority
FR
France
Prior art keywords
integration
capacitive elements
ceramic form
perovskite ceramic
perovskite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0551008A
Other languages
English (en)
Other versions
FR2884969A1 (fr
Inventor
Ludovic Goux
Monique Gervais
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0551008A priority Critical patent/FR2884969B1/fr
Priority to US11/407,681 priority patent/US7700981B2/en
Publication of FR2884969A1 publication Critical patent/FR2884969A1/fr
Application granted granted Critical
Publication of FR2884969B1 publication Critical patent/FR2884969B1/fr
Priority to US12/716,289 priority patent/US7883906B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
FR0551008A 2005-04-20 2005-04-20 Integration d'elements capacitifs sous forme de ceramique perovskite Expired - Fee Related FR2884969B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0551008A FR2884969B1 (fr) 2005-04-20 2005-04-20 Integration d'elements capacitifs sous forme de ceramique perovskite
US11/407,681 US7700981B2 (en) 2005-04-20 2006-04-20 Integration of capacitive elements in the form of perovskite ceramic
US12/716,289 US7883906B2 (en) 2005-04-20 2010-03-03 Integration of capacitive elements in the form of perovskite ceramic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0551008A FR2884969B1 (fr) 2005-04-20 2005-04-20 Integration d'elements capacitifs sous forme de ceramique perovskite

Publications (2)

Publication Number Publication Date
FR2884969A1 FR2884969A1 (fr) 2006-10-27
FR2884969B1 true FR2884969B1 (fr) 2008-04-11

Family

ID=35588906

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0551008A Expired - Fee Related FR2884969B1 (fr) 2005-04-20 2005-04-20 Integration d'elements capacitifs sous forme de ceramique perovskite

Country Status (2)

Country Link
US (2) US7700981B2 (fr)
FR (1) FR2884969B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2884969B1 (fr) * 2005-04-20 2008-04-11 St Microelectronics Sa Integration d'elements capacitifs sous forme de ceramique perovskite
US10403708B2 (en) 2016-03-09 2019-09-03 The Regents Of The University Of California Graded bandgap perovskite solar cell
US20180151301A1 (en) * 2016-11-25 2018-05-31 The Boeing Company Epitaxial perovskite materials for optoelectronics
US10861992B2 (en) 2016-11-25 2020-12-08 The Boeing Company Perovskite solar cells for space

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6518609B1 (en) * 2000-08-31 2003-02-11 University Of Maryland Niobium or vanadium substituted strontium titanate barrier intermediate a silicon underlayer and a functional metal oxide film
US6531235B2 (en) * 2001-06-06 2003-03-11 Max-Planck-Institute für Mikrostrukturphysik Non-c-axis oriented bismuth-layered perovskite ferroelectric structure epitaxially grown on buffered silicon
WO2004005587A2 (fr) 2002-07-08 2004-01-15 The Regents Of The University Of California Nanostructuration superficielle
US7399356B2 (en) * 2002-12-17 2008-07-15 Ibule Photonics, Inc. Method for preparation of ferroelectric single crystal film structure using deposition method
US6876536B2 (en) * 2002-12-27 2005-04-05 Tdk Corporation Thin film capacitor and method for fabricating the same
US7095067B2 (en) * 2003-05-27 2006-08-22 Lucent Technologies Inc. Oxidation-resistant conducting perovskites
FR2884969B1 (fr) * 2005-04-20 2008-04-11 St Microelectronics Sa Integration d'elements capacitifs sous forme de ceramique perovskite

Also Published As

Publication number Publication date
US7700981B2 (en) 2010-04-20
US20100159666A1 (en) 2010-06-24
US7883906B2 (en) 2011-02-08
FR2884969A1 (fr) 2006-10-27
US20070007565A1 (en) 2007-01-11

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20131231