FR2881224B1 - ASSEMBLY FOR DETECTING THE ABSOLUTE PRESSURE OF A FLUID - Google Patents
ASSEMBLY FOR DETECTING THE ABSOLUTE PRESSURE OF A FLUIDInfo
- Publication number
- FR2881224B1 FR2881224B1 FR0500640A FR0500640A FR2881224B1 FR 2881224 B1 FR2881224 B1 FR 2881224B1 FR 0500640 A FR0500640 A FR 0500640A FR 0500640 A FR0500640 A FR 0500640A FR 2881224 B1 FR2881224 B1 FR 2881224B1
- Authority
- FR
- France
- Prior art keywords
- fluid
- detecting
- assembly
- absolute pressure
- absolute
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012530 fluid Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0500640A FR2881224B1 (en) | 2005-01-21 | 2005-01-21 | ASSEMBLY FOR DETECTING THE ABSOLUTE PRESSURE OF A FLUID |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0500640A FR2881224B1 (en) | 2005-01-21 | 2005-01-21 | ASSEMBLY FOR DETECTING THE ABSOLUTE PRESSURE OF A FLUID |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2881224A1 FR2881224A1 (en) | 2006-07-28 |
FR2881224B1 true FR2881224B1 (en) | 2007-11-23 |
Family
ID=35045093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0500640A Active FR2881224B1 (en) | 2005-01-21 | 2005-01-21 | ASSEMBLY FOR DETECTING THE ABSOLUTE PRESSURE OF A FLUID |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2881224B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105366623A (en) * | 2014-08-12 | 2016-03-02 | 精工爱普生株式会社 | Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4023562A (en) * | 1975-09-02 | 1977-05-17 | Case Western Reserve University | Miniature pressure transducer for medical use and assembly method |
JPS54131892A (en) * | 1978-04-05 | 1979-10-13 | Hitachi Ltd | Semiconductor pressure converter |
US4800758A (en) * | 1986-06-23 | 1989-01-31 | Rosemount Inc. | Pressure transducer with stress isolation for hard mounting |
US5591679A (en) * | 1995-04-12 | 1997-01-07 | Sensonor A/S | Sealed cavity arrangement method |
US5600071A (en) * | 1995-09-05 | 1997-02-04 | Motorola, Inc. | Vertically integrated sensor structure and method |
US6346742B1 (en) * | 1998-11-12 | 2002-02-12 | Maxim Integrated Products, Inc. | Chip-scale packaged pressure sensor |
US20030167851A1 (en) * | 2002-01-30 | 2003-09-11 | Parker Gregory D. | Absolute micromachined silicon pressure sensor with backside hermetic cover and method of making the same |
-
2005
- 2005-01-21 FR FR0500640A patent/FR2881224B1/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105366623A (en) * | 2014-08-12 | 2016-03-02 | 精工爱普生株式会社 | Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object |
Also Published As
Publication number | Publication date |
---|---|
FR2881224A1 (en) | 2006-07-28 |
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Legal Events
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PLFP | Fee payment |
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PLFP | Fee payment |
Year of fee payment: 20 |