FR2877641B1 - METHOD FOR CONDITIONING THE ATMOSPHERE OF TRANSPORT BOXES OF WAFERS, IN PARTICULAR OF THE FOSB TYPE - Google Patents

METHOD FOR CONDITIONING THE ATMOSPHERE OF TRANSPORT BOXES OF WAFERS, IN PARTICULAR OF THE FOSB TYPE

Info

Publication number
FR2877641B1
FR2877641B1 FR0452587A FR0452587A FR2877641B1 FR 2877641 B1 FR2877641 B1 FR 2877641B1 FR 0452587 A FR0452587 A FR 0452587A FR 0452587 A FR0452587 A FR 0452587A FR 2877641 B1 FR2877641 B1 FR 2877641B1
Authority
FR
France
Prior art keywords
wafers
conditioning
atmosphere
transport boxes
fosb type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0452587A
Other languages
French (fr)
Other versions
FR2877641A1 (en
Inventor
Marc Leturmy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR0452587A priority Critical patent/FR2877641B1/en
Publication of FR2877641A1 publication Critical patent/FR2877641A1/en
Application granted granted Critical
Publication of FR2877641B1 publication Critical patent/FR2877641B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR0452587A 2004-11-10 2004-11-10 METHOD FOR CONDITIONING THE ATMOSPHERE OF TRANSPORT BOXES OF WAFERS, IN PARTICULAR OF THE FOSB TYPE Expired - Fee Related FR2877641B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0452587A FR2877641B1 (en) 2004-11-10 2004-11-10 METHOD FOR CONDITIONING THE ATMOSPHERE OF TRANSPORT BOXES OF WAFERS, IN PARTICULAR OF THE FOSB TYPE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0452587A FR2877641B1 (en) 2004-11-10 2004-11-10 METHOD FOR CONDITIONING THE ATMOSPHERE OF TRANSPORT BOXES OF WAFERS, IN PARTICULAR OF THE FOSB TYPE

Publications (2)

Publication Number Publication Date
FR2877641A1 FR2877641A1 (en) 2006-05-12
FR2877641B1 true FR2877641B1 (en) 2006-12-22

Family

ID=34951605

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0452587A Expired - Fee Related FR2877641B1 (en) 2004-11-10 2004-11-10 METHOD FOR CONDITIONING THE ATMOSPHERE OF TRANSPORT BOXES OF WAFERS, IN PARTICULAR OF THE FOSB TYPE

Country Status (1)

Country Link
FR (1) FR2877641B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2963327B1 (en) 2010-07-27 2012-08-24 Air Liquide DEVICE FOR STORING ARTICLES UNDER CONTROLLED ATMOSPHERE

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003092345A (en) * 2001-07-13 2003-03-28 Semiconductor Leading Edge Technologies Inc Substrate container, substrate transport system, storage device and gas substituting method
FR2834974B1 (en) * 2002-01-24 2004-10-15 Air Liquide STORAGE ENCLOSURE, GAS DISCHARGE VALVE THEREFOR, AND METHOD FOR SUPPLYING GAS TO THE ENCLOSURE

Also Published As

Publication number Publication date
FR2877641A1 (en) 2006-05-12

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Legal Events

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ST Notification of lapse

Effective date: 20100730