FR2868332B1 - Appareil de traitement d'effluents gazeux - Google Patents

Appareil de traitement d'effluents gazeux

Info

Publication number
FR2868332B1
FR2868332B1 FR0450640A FR0450640A FR2868332B1 FR 2868332 B1 FR2868332 B1 FR 2868332B1 FR 0450640 A FR0450640 A FR 0450640A FR 0450640 A FR0450640 A FR 0450640A FR 2868332 B1 FR2868332 B1 FR 2868332B1
Authority
FR
France
Prior art keywords
gaseous effluents
treating gaseous
treating
effluents
gaseous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0450640A
Other languages
English (en)
Other versions
FR2868332A1 (fr
Inventor
Herve Dulphy
Pascal Moine
Thierry Laederich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Electronics Systems SA
Original Assignee
Air Liquide Electronics Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide Electronics Systems SA filed Critical Air Liquide Electronics Systems SA
Priority to FR0450640A priority Critical patent/FR2868332B1/fr
Priority to TW094109227A priority patent/TWI378491B/zh
Priority to EP05739623A priority patent/EP1732670A1/fr
Priority to PCT/FR2005/050198 priority patent/WO2005094973A1/fr
Priority to US10/592,336 priority patent/US8016271B2/en
Publication of FR2868332A1 publication Critical patent/FR2868332A1/fr
Application granted granted Critical
Publication of FR2868332B1 publication Critical patent/FR2868332B1/fr
Priority to US13/173,027 priority patent/US8308146B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18—Absorbing units; Liquid distributors therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
FR0450640A 2004-03-31 2004-03-31 Appareil de traitement d'effluents gazeux Expired - Fee Related FR2868332B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0450640A FR2868332B1 (fr) 2004-03-31 2004-03-31 Appareil de traitement d'effluents gazeux
TW094109227A TWI378491B (en) 2004-03-31 2005-03-25 Apparatus for effluent gas treatment
EP05739623A EP1732670A1 (fr) 2004-03-31 2005-03-30 Appareil de traitement d'effluents gazeux
PCT/FR2005/050198 WO2005094973A1 (fr) 2004-03-31 2005-03-30 Appareil de traitement d'effluents gazeux
US10/592,336 US8016271B2 (en) 2004-03-31 2005-03-31 Gaseous effluent treatment apparatus
US13/173,027 US8308146B2 (en) 2004-03-31 2011-06-30 Gaseous effluent treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0450640A FR2868332B1 (fr) 2004-03-31 2004-03-31 Appareil de traitement d'effluents gazeux

Publications (2)

Publication Number Publication Date
FR2868332A1 FR2868332A1 (fr) 2005-10-07
FR2868332B1 true FR2868332B1 (fr) 2006-05-26

Family

ID=34944702

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0450640A Expired - Fee Related FR2868332B1 (fr) 2004-03-31 2004-03-31 Appareil de traitement d'effluents gazeux

Country Status (5)

Country Link
US (2) US8016271B2 (fr)
EP (1) EP1732670A1 (fr)
FR (1) FR2868332B1 (fr)
TW (1) TWI378491B (fr)
WO (1) WO2005094973A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2868332B1 (fr) 2004-03-31 2006-05-26 Air Liquide Electronics Sys Appareil de traitement d'effluents gazeux
FR2884442B1 (fr) * 2005-04-19 2007-05-25 Air Liquide Dispositif d'agitation d'un liquide et d'injection d'un gaz dans ce liquide adapte a des bassins de faibles profondeurs
JP3921231B1 (ja) * 2006-09-15 2007-05-30 稔 菅野 殺菌方法および殺菌処理装置
US8640656B1 (en) * 2010-02-27 2014-02-04 Woody Vouth Vann Self-sustaining boiler system
JP5914037B2 (ja) * 2012-02-23 2016-05-11 東京エレクトロン株式会社 冷却システム、冷却システムを備える基板処理装置及び冷却方法
CN104607028B (zh) * 2015-01-16 2016-04-13 竺珺 一种脱硫除尘控制系统
CN107321156B (zh) * 2017-07-01 2020-05-29 钱敏芳 一种气体处理机
CN107224861B (zh) * 2017-07-01 2020-05-05 钱敏芳 一种气体处理机

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3497185A (en) * 1968-11-20 1970-02-24 Sydnor Hydrodynamics Inc Aerating and cooling apparatus
FR2402472A1 (fr) * 1977-09-13 1979-04-06 Alsthom Atlantique Appareil pour le maintien en suspension de produits solides et procede d'utilisation
US4290885A (en) * 1977-12-22 1981-09-22 Dochan Kwak Aeration device
CH658710A5 (de) * 1984-07-09 1986-11-28 Vth Ag Vorrichtung zur erhitzung eines fluids und zur reinigung der abgase von feuerungsanlagen.
US4846965A (en) * 1987-09-14 1989-07-11 Clifft Ricky C Oxygen controlling wastewater treatment system
DE3818161A1 (de) * 1988-05-28 1989-12-07 Bayer Ag Verfahren und vorrichtung zum kontinuierlichen beladen mindestens einer fliessfaehigen reaktionskomponente mit gas fuer die herstellung eines schaumstoffbildenden, fliessfaehigen reaktionsgemisches
US5352421A (en) * 1989-12-05 1994-10-04 University Of Toronto Innovations Foundation Method and apparatus for effecting gas-liquid contact
US5108662A (en) * 1991-05-01 1992-04-28 Union Carbide Industrial Gases Technology Corporation Gas-liquid mixing process and apparatus
FR2702159B1 (fr) * 1993-03-05 1995-04-28 Raymond Berchotteau Appareil pour introduire et diffuser de l'air ou un gaz dans un liquide.
JP3332678B2 (ja) * 1995-08-03 2002-10-07 三菱重工業株式会社 湿式排煙脱硫装置
KR200187153Y1 (ko) * 1997-08-27 2000-07-01 윤종용 화상형성장치의 증기회수장치용 응축장치
CA2303780C (fr) * 1997-09-15 2008-07-29 Den Norske Stats Oljeselskap A.S. Systeme de separation de fluide
DE69833030T2 (de) * 1997-10-17 2006-08-24 Ebara Corp. Verfahren und vorrichtung zur behandlung von abgasen aus der halbleiterherstellung
US6007055A (en) * 1997-12-29 1999-12-28 Schifftner; Kenneth C. Gas and liquid contact apparatus
US6109449A (en) * 1998-11-04 2000-08-29 General Signal Corporation Mixing system for separation of materials by flotation
FR2868332B1 (fr) 2004-03-31 2006-05-26 Air Liquide Electronics Sys Appareil de traitement d'effluents gazeux
US6966983B1 (en) * 2004-10-01 2005-11-22 Mixing And Mass Transfer Technologies, Llc Continuous multistage thermophilic aerobic sludge digestion system

Also Published As

Publication number Publication date
US8308146B2 (en) 2012-11-13
US20110259196A1 (en) 2011-10-27
FR2868332A1 (fr) 2005-10-07
US20070205522A1 (en) 2007-09-06
WO2005094973A1 (fr) 2005-10-13
US8016271B2 (en) 2011-09-13
TWI378491B (en) 2012-12-01
EP1732670A1 (fr) 2006-12-20
TW200539240A (en) 2005-12-01

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20141128