FR2867282B1 - HIGH-THROUGH OPTICAL MICROSCOPE FOR USE IN EXTREME ULTRAVIOLET - Google Patents

HIGH-THROUGH OPTICAL MICROSCOPE FOR USE IN EXTREME ULTRAVIOLET

Info

Publication number
FR2867282B1
FR2867282B1 FR0402206A FR0402206A FR2867282B1 FR 2867282 B1 FR2867282 B1 FR 2867282B1 FR 0402206 A FR0402206 A FR 0402206A FR 0402206 A FR0402206 A FR 0402206A FR 2867282 B1 FR2867282 B1 FR 2867282B1
Authority
FR
France
Prior art keywords
optical microscope
extreme ultraviolet
extreme
ultraviolet
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0402206A
Other languages
French (fr)
Other versions
FR2867282A1 (en
Inventor
Miguel Boutonne
Xavier Bozec
Roland Geyl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Priority to FR0402206A priority Critical patent/FR2867282B1/en
Priority to PCT/FR2005/000459 priority patent/WO2005096060A1/en
Publication of FR2867282A1 publication Critical patent/FR2867282A1/en
Application granted granted Critical
Publication of FR2867282B1 publication Critical patent/FR2867282B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/04—Objectives involving mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/16—Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
FR0402206A 2004-03-03 2004-03-03 HIGH-THROUGH OPTICAL MICROSCOPE FOR USE IN EXTREME ULTRAVIOLET Expired - Fee Related FR2867282B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0402206A FR2867282B1 (en) 2004-03-03 2004-03-03 HIGH-THROUGH OPTICAL MICROSCOPE FOR USE IN EXTREME ULTRAVIOLET
PCT/FR2005/000459 WO2005096060A1 (en) 2004-03-03 2005-02-25 Optical microscope with high magnification, which can be used in the extreme ultraviolet radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0402206A FR2867282B1 (en) 2004-03-03 2004-03-03 HIGH-THROUGH OPTICAL MICROSCOPE FOR USE IN EXTREME ULTRAVIOLET

Publications (2)

Publication Number Publication Date
FR2867282A1 FR2867282A1 (en) 2005-09-09
FR2867282B1 true FR2867282B1 (en) 2006-05-26

Family

ID=34855021

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0402206A Expired - Fee Related FR2867282B1 (en) 2004-03-03 2004-03-03 HIGH-THROUGH OPTICAL MICROSCOPE FOR USE IN EXTREME ULTRAVIOLET

Country Status (2)

Country Link
FR (1) FR2867282B1 (en)
WO (1) WO2005096060A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010148293A2 (en) * 2009-06-19 2010-12-23 Kla-Tencor Corporation Euv high throughput inspection system for defect detection on patterned euv masks, mask blanks, and wafers
DE102009035583A1 (en) 2009-07-29 2011-02-03 Carl Zeiss Sms Gmbh Magnifying imaging optics and metrology system with such an imaging optics

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0776745B2 (en) * 1989-11-03 1995-08-16 株式会社堀場製作所 Microspectrophotometer
JP3151260B2 (en) * 1991-12-09 2001-04-03 オリンパス光学工業株式会社 Incident X-ray microscope

Also Published As

Publication number Publication date
WO2005096060A1 (en) 2005-10-13
FR2867282A1 (en) 2005-09-09

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse

Effective date: 20141128