FR2860304B1 - OPTICAL SYSTEM WITH HIGH DIGITAL OPENING - Google Patents

OPTICAL SYSTEM WITH HIGH DIGITAL OPENING

Info

Publication number
FR2860304B1
FR2860304B1 FR0311294A FR0311294A FR2860304B1 FR 2860304 B1 FR2860304 B1 FR 2860304B1 FR 0311294 A FR0311294 A FR 0311294A FR 0311294 A FR0311294 A FR 0311294A FR 2860304 B1 FR2860304 B1 FR 2860304B1
Authority
FR
France
Prior art keywords
optical system
high digital
digital opening
opening
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0311294A
Other languages
French (fr)
Other versions
FR2860304A1 (en
Inventor
Roland Geyl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Priority to FR0311294A priority Critical patent/FR2860304B1/en
Priority to PCT/FR2004/002417 priority patent/WO2005031425A1/en
Publication of FR2860304A1 publication Critical patent/FR2860304A1/en
Application granted granted Critical
Publication of FR2860304B1 publication Critical patent/FR2860304B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
    • G02B13/143—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Lenses (AREA)
FR0311294A 2003-09-26 2003-09-26 OPTICAL SYSTEM WITH HIGH DIGITAL OPENING Expired - Fee Related FR2860304B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0311294A FR2860304B1 (en) 2003-09-26 2003-09-26 OPTICAL SYSTEM WITH HIGH DIGITAL OPENING
PCT/FR2004/002417 WO2005031425A1 (en) 2003-09-26 2004-09-24 Catadioptric system with high numerical aperture for microlithography

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0311294A FR2860304B1 (en) 2003-09-26 2003-09-26 OPTICAL SYSTEM WITH HIGH DIGITAL OPENING

Publications (2)

Publication Number Publication Date
FR2860304A1 FR2860304A1 (en) 2005-04-01
FR2860304B1 true FR2860304B1 (en) 2005-11-25

Family

ID=34307187

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0311294A Expired - Fee Related FR2860304B1 (en) 2003-09-26 2003-09-26 OPTICAL SYSTEM WITH HIGH DIGITAL OPENING

Country Status (2)

Country Link
FR (1) FR2860304B1 (en)
WO (1) WO2005031425A1 (en)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3343219A1 (en) * 1983-11-30 1985-06-05 Schneider Co Optische Werke MIRROR SCOPE WITH UPRIGHT IMAGE
DE69132160T2 (en) * 1991-07-19 2000-09-28 At & T Corp., New York Lithography with ring-shaped image field
US6226346B1 (en) * 1998-06-09 2001-05-01 The Regents Of The University Of California Reflective optical imaging systems with balanced distortion
US6213610B1 (en) * 1998-09-21 2001-04-10 Nikon Corporation Catoptric reduction projection optical system and exposure apparatus and method using same
US6424404B1 (en) * 1999-01-11 2002-07-23 Kenneth C. Johnson Multi-stage microlens array
US6498685B1 (en) * 1999-01-11 2002-12-24 Kenneth C. Johnson Maskless, microlens EUV lithography system
US6600608B1 (en) * 1999-11-05 2003-07-29 Carl-Zeiss-Stiftung Catadioptric objective comprising two intermediate images
TW538256B (en) * 2000-01-14 2003-06-21 Zeiss Stiftung Microlithographic reduction projection catadioptric objective
JP2002329655A (en) * 2001-05-01 2002-11-15 Canon Inc Reflection type contraction projection optical system, aligner and device manufacturing method

Also Published As

Publication number Publication date
FR2860304A1 (en) 2005-04-01
WO2005031425A1 (en) 2005-04-07

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse

Effective date: 20140530