FR2849504B1 - PROCESS FOR THE OPTICAL CHARACTERIZATION OF MATERIALS WITHOUT THE USE OF A PHYSICAL MODEL - Google Patents

PROCESS FOR THE OPTICAL CHARACTERIZATION OF MATERIALS WITHOUT THE USE OF A PHYSICAL MODEL

Info

Publication number
FR2849504B1
FR2849504B1 FR0216847A FR0216847A FR2849504B1 FR 2849504 B1 FR2849504 B1 FR 2849504B1 FR 0216847 A FR0216847 A FR 0216847A FR 0216847 A FR0216847 A FR 0216847A FR 2849504 B1 FR2849504 B1 FR 2849504B1
Authority
FR
France
Prior art keywords
materials
physical model
optical characterization
characterization
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0216847A
Other languages
French (fr)
Other versions
FR2849504A1 (en
Inventor
Jerome Hazart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0216847A priority Critical patent/FR2849504B1/en
Priority to FR0350635A priority patent/FR2849505B1/en
Priority to PCT/FR2003/050211 priority patent/WO2004061432A2/en
Priority to EP03810019.4A priority patent/EP1579197B1/en
Priority to US10/540,003 priority patent/US7307723B2/en
Publication of FR2849504A1 publication Critical patent/FR2849504A1/en
Application granted granted Critical
Publication of FR2849504B1 publication Critical patent/FR2849504B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry
FR0216847A 2002-12-30 2002-12-30 PROCESS FOR THE OPTICAL CHARACTERIZATION OF MATERIALS WITHOUT THE USE OF A PHYSICAL MODEL Expired - Fee Related FR2849504B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0216847A FR2849504B1 (en) 2002-12-30 2002-12-30 PROCESS FOR THE OPTICAL CHARACTERIZATION OF MATERIALS WITHOUT THE USE OF A PHYSICAL MODEL
FR0350635A FR2849505B1 (en) 2002-12-30 2003-10-02 PROCESS FOR THE OPTICAL CHARACTERIZATION OF MATERIALS WITHOUT THE USE OF A PHYSICAL MODEL
PCT/FR2003/050211 WO2004061432A2 (en) 2002-12-30 2003-12-24 Method for the optical characterization of materials without using a physical model
EP03810019.4A EP1579197B1 (en) 2002-12-30 2003-12-24 Method for the optical characterization of materials without using a physical model
US10/540,003 US7307723B2 (en) 2002-12-30 2003-12-24 Method for the optical characterization of materials without using a physical model

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0216847A FR2849504B1 (en) 2002-12-30 2002-12-30 PROCESS FOR THE OPTICAL CHARACTERIZATION OF MATERIALS WITHOUT THE USE OF A PHYSICAL MODEL

Publications (2)

Publication Number Publication Date
FR2849504A1 FR2849504A1 (en) 2004-07-02
FR2849504B1 true FR2849504B1 (en) 2005-03-11

Family

ID=32480279

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0216847A Expired - Fee Related FR2849504B1 (en) 2002-12-30 2002-12-30 PROCESS FOR THE OPTICAL CHARACTERIZATION OF MATERIALS WITHOUT THE USE OF A PHYSICAL MODEL

Country Status (1)

Country Link
FR (1) FR2849504B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2859781B1 (en) 2003-09-17 2007-07-06 Commissariat Energie Atomique USE OF OPTICAL FOURIER TRANSFORMATION FOR DIMENSIONAL MICROELECTRONIC CONTROL

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5956145A (en) * 1992-09-18 1999-09-21 J. A. Woollam Co. Inc. System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems
US7099005B1 (en) * 2000-09-27 2006-08-29 Kla-Tencor Technologies Corporation System for scatterometric measurements and applications

Also Published As

Publication number Publication date
FR2849504A1 (en) 2004-07-02

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Effective date: 20190906