FR2848060B1 - Systeme a arc controle par multi-circulation pour production de plasma hors equilibre - Google Patents

Systeme a arc controle par multi-circulation pour production de plasma hors equilibre

Info

Publication number
FR2848060B1
FR2848060B1 FR0215213A FR0215213A FR2848060B1 FR 2848060 B1 FR2848060 B1 FR 2848060B1 FR 0215213 A FR0215213 A FR 0215213A FR 0215213 A FR0215213 A FR 0215213A FR 2848060 B1 FR2848060 B1 FR 2848060B1
Authority
FR
France
Prior art keywords
plasma production
arc system
controlled arc
circulation controlled
balanced plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0215213A
Other languages
English (en)
Other versions
FR2848060A1 (fr
Inventor
Jean Claude Raybaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR0215213A priority Critical patent/FR2848060B1/fr
Priority to PCT/FR2003/003545 priority patent/WO2004054330A1/fr
Priority to AU2003298383A priority patent/AU2003298383A1/en
Publication of FR2848060A1 publication Critical patent/FR2848060A1/fr
Application granted granted Critical
Publication of FR2848060B1 publication Critical patent/FR2848060B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
FR0215213A 2002-12-03 2002-12-03 Systeme a arc controle par multi-circulation pour production de plasma hors equilibre Expired - Fee Related FR2848060B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0215213A FR2848060B1 (fr) 2002-12-03 2002-12-03 Systeme a arc controle par multi-circulation pour production de plasma hors equilibre
PCT/FR2003/003545 WO2004054330A1 (fr) 2002-12-03 2003-12-02 Procedepour generer un plasma hors equilibre a caracteristiques controlees et dispositif pour sa mise en oeuvre
AU2003298383A AU2003298383A1 (en) 2002-12-03 2003-12-02 Method for generating an off-balance plasma with controlled characteristics and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0215213A FR2848060B1 (fr) 2002-12-03 2002-12-03 Systeme a arc controle par multi-circulation pour production de plasma hors equilibre

Publications (2)

Publication Number Publication Date
FR2848060A1 FR2848060A1 (fr) 2004-06-04
FR2848060B1 true FR2848060B1 (fr) 2005-03-04

Family

ID=32309964

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0215213A Expired - Fee Related FR2848060B1 (fr) 2002-12-03 2002-12-03 Systeme a arc controle par multi-circulation pour production de plasma hors equilibre

Country Status (3)

Country Link
AU (1) AU2003298383A1 (fr)
FR (1) FR2848060B1 (fr)
WO (1) WO2004054330A1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1235569A (zh) * 1996-11-01 1999-11-17 乔治·H·米利 利用惯性静电约束放电等离子体的等离子体喷射源
FR2758317B1 (fr) * 1997-01-13 1999-09-17 Piotr Czernichowski Conversion d'hydrocarbures assistee par les arcs electriques glissants en presence de la vapeur d'eau et/ou de gaz carbonique
FR2775864A1 (fr) * 1998-03-06 1999-09-03 Physiques Et Chimiques Dispositif a decharges electriques froides et ses applications pour traiter des gaz, des vapeurs et/ou de la matiere solide ou liquide dispersee
WO2002058452A2 (fr) * 2001-01-25 2002-08-01 Water Works Global Inc. Dispositif de traitement chimique au plasma de l'eau dans un milieu de décharge électroluminescente non autonome

Also Published As

Publication number Publication date
FR2848060A1 (fr) 2004-06-04
AU2003298383A1 (en) 2004-06-30
WO2004054330A1 (fr) 2004-06-24

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20070831