FR2841338B1 - MICROSCOPY METHOD AND DEVICE - Google Patents

MICROSCOPY METHOD AND DEVICE

Info

Publication number
FR2841338B1
FR2841338B1 FR0207775A FR0207775A FR2841338B1 FR 2841338 B1 FR2841338 B1 FR 2841338B1 FR 0207775 A FR0207775 A FR 0207775A FR 0207775 A FR0207775 A FR 0207775A FR 2841338 B1 FR2841338 B1 FR 2841338B1
Authority
FR
France
Prior art keywords
microscopy method
microscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0207775A
Other languages
French (fr)
Other versions
FR2841338A1 (en
Inventor
Michael Magoga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR0207775A priority Critical patent/FR2841338B1/en
Publication of FR2841338A1 publication Critical patent/FR2841338A1/en
Application granted granted Critical
Publication of FR2841338B1 publication Critical patent/FR2841338B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR0207775A 2002-06-24 2002-06-24 MICROSCOPY METHOD AND DEVICE Expired - Fee Related FR2841338B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0207775A FR2841338B1 (en) 2002-06-24 2002-06-24 MICROSCOPY METHOD AND DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0207775A FR2841338B1 (en) 2002-06-24 2002-06-24 MICROSCOPY METHOD AND DEVICE

Publications (2)

Publication Number Publication Date
FR2841338A1 FR2841338A1 (en) 2003-12-26
FR2841338B1 true FR2841338B1 (en) 2006-05-19

Family

ID=29719983

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0207775A Expired - Fee Related FR2841338B1 (en) 2002-06-24 2002-06-24 MICROSCOPY METHOD AND DEVICE

Country Status (1)

Country Link
FR (1) FR2841338B1 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3568741B2 (en) * 1997-07-31 2004-09-22 株式会社東芝 Semiconductor evaluation device and semiconductor manufacturing system

Also Published As

Publication number Publication date
FR2841338A1 (en) 2003-12-26

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120229