FR2841004B1 - Procede lithographique utilisant une resine a amplification chimique et comprenant des etapes de limitation d'un fluage de la resine - Google Patents

Procede lithographique utilisant une resine a amplification chimique et comprenant des etapes de limitation d'un fluage de la resine

Info

Publication number
FR2841004B1
FR2841004B1 FR0207516A FR0207516A FR2841004B1 FR 2841004 B1 FR2841004 B1 FR 2841004B1 FR 0207516 A FR0207516 A FR 0207516A FR 0207516 A FR0207516 A FR 0207516A FR 2841004 B1 FR2841004 B1 FR 2841004B1
Authority
FR
France
Prior art keywords
resin
steps
lithographic process
limiting
chemical amplification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0207516A
Other languages
English (en)
Other versions
FR2841004A1 (fr
Inventor
Benedicte Mortini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0207516A priority Critical patent/FR2841004B1/fr
Priority to US10/459,118 priority patent/US20040007382A1/en
Publication of FR2841004A1 publication Critical patent/FR2841004A1/fr
Application granted granted Critical
Publication of FR2841004B1 publication Critical patent/FR2841004B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2024—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure of the already developed image
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
FR0207516A 2002-06-18 2002-06-18 Procede lithographique utilisant une resine a amplification chimique et comprenant des etapes de limitation d'un fluage de la resine Expired - Fee Related FR2841004B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0207516A FR2841004B1 (fr) 2002-06-18 2002-06-18 Procede lithographique utilisant une resine a amplification chimique et comprenant des etapes de limitation d'un fluage de la resine
US10/459,118 US20040007382A1 (en) 2002-06-18 2003-06-10 Lithographic process using a chemical amplification resist and steps for limiting creep of the resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0207516A FR2841004B1 (fr) 2002-06-18 2002-06-18 Procede lithographique utilisant une resine a amplification chimique et comprenant des etapes de limitation d'un fluage de la resine

Publications (2)

Publication Number Publication Date
FR2841004A1 FR2841004A1 (fr) 2003-12-19
FR2841004B1 true FR2841004B1 (fr) 2004-12-17

Family

ID=29595365

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0207516A Expired - Fee Related FR2841004B1 (fr) 2002-06-18 2002-06-18 Procede lithographique utilisant une resine a amplification chimique et comprenant des etapes de limitation d'un fluage de la resine

Country Status (2)

Country Link
US (1) US20040007382A1 (fr)
FR (1) FR2841004B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080140982A1 (en) * 2006-10-05 2008-06-12 Holt John M Redundant multiple computer architecture
US20100159392A1 (en) * 2008-12-22 2010-06-24 Shin-Etsu Chemical Co., Ltd. Patterning process and resist composition
EP2472327A1 (fr) 2010-12-30 2012-07-04 Rohm and Haas Electronic Materials LLC Photorésines et leurs procédés d'utilisation
FR2979716A1 (fr) * 2011-09-05 2013-03-08 St Microelectronics Crolles 2 Procede de photolithographie utilisant une resine a amplification chimique

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5648198A (en) * 1994-12-13 1997-07-15 Kabushiki Kaisha Toshiba Resist hardening process having improved thermal stability
US6057084A (en) * 1997-10-03 2000-05-02 Fusion Systems Corporation Controlled amine poisoning for reduced shrinkage of features formed in photoresist
US6107002A (en) * 1998-10-29 2000-08-22 Micron Technology, Inc. Reducing resist shrinkage during device fabrication

Also Published As

Publication number Publication date
FR2841004A1 (fr) 2003-12-19
US20040007382A1 (en) 2004-01-15

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20080229