FR2827270B1 - PROCESS FOR MANUFACTURING MICROSCOPIC PARTS - Google Patents
PROCESS FOR MANUFACTURING MICROSCOPIC PARTSInfo
- Publication number
- FR2827270B1 FR2827270B1 FR0109363A FR0109363A FR2827270B1 FR 2827270 B1 FR2827270 B1 FR 2827270B1 FR 0109363 A FR0109363 A FR 0109363A FR 0109363 A FR0109363 A FR 0109363A FR 2827270 B1 FR2827270 B1 FR 2827270B1
- Authority
- FR
- France
- Prior art keywords
- microscopic parts
- manufacturing
- manufacturing microscopic
- parts
- microscopic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00388—Etch mask forming
- B81C1/00404—Mask characterised by its size, orientation or shape
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Drying Of Semiconductors (AREA)
- Micromachines (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0109363A FR2827270B1 (en) | 2001-07-13 | 2001-07-13 | PROCESS FOR MANUFACTURING MICROSCOPIC PARTS |
PCT/FR2002/002488 WO2003007026A1 (en) | 2001-07-13 | 2002-07-12 | Method for producing microscopic components |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0109363A FR2827270B1 (en) | 2001-07-13 | 2001-07-13 | PROCESS FOR MANUFACTURING MICROSCOPIC PARTS |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2827270A1 FR2827270A1 (en) | 2003-01-17 |
FR2827270B1 true FR2827270B1 (en) | 2004-01-02 |
Family
ID=8865474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0109363A Expired - Fee Related FR2827270B1 (en) | 2001-07-13 | 2001-07-13 | PROCESS FOR MANUFACTURING MICROSCOPIC PARTS |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2827270B1 (en) |
WO (1) | WO2003007026A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1500975A3 (en) * | 2003-07-21 | 2006-01-18 | Ingeneric GmbH | Process for the fabrication of optical microstructures |
FR2875339B1 (en) * | 2004-09-16 | 2006-12-08 | St Microelectronics Sa | MOS TRANSISTOR WITH DEFORMABLE GRID |
NL1034489C2 (en) | 2007-10-09 | 2009-04-14 | Micronit Microfluidics Bv | Methods for manufacturing a microstructure. |
EP2937311B1 (en) * | 2014-04-25 | 2019-08-21 | Rolex Sa | Method for manufacturing a reinforced timepiece component, corresponding timepiece component and timepiece |
EP3656733A1 (en) * | 2018-11-23 | 2020-05-27 | Murata Manufacturing Co., Ltd. | Method for etching recessed structures |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0398082A1 (en) * | 1989-05-19 | 1990-11-22 | Siemens Aktiengesellschaft | Method for optical lens production |
JP3089870B2 (en) * | 1992-12-28 | 2000-09-18 | 富士電機株式会社 | Processing method of silicon substrate |
CA2298492A1 (en) * | 1999-02-19 | 2000-08-19 | Hyun-Kuk Shin | Micro-lens, combination micro-lens and vertical cavity surface emitting laser, and methods for manufacturing the same |
-
2001
- 2001-07-13 FR FR0109363A patent/FR2827270B1/en not_active Expired - Fee Related
-
2002
- 2002-07-12 WO PCT/FR2002/002488 patent/WO2003007026A1/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
WO2003007026A1 (en) | 2003-01-23 |
FR2827270A1 (en) | 2003-01-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |