FR2827270B1 - PROCESS FOR MANUFACTURING MICROSCOPIC PARTS - Google Patents

PROCESS FOR MANUFACTURING MICROSCOPIC PARTS

Info

Publication number
FR2827270B1
FR2827270B1 FR0109363A FR0109363A FR2827270B1 FR 2827270 B1 FR2827270 B1 FR 2827270B1 FR 0109363 A FR0109363 A FR 0109363A FR 0109363 A FR0109363 A FR 0109363A FR 2827270 B1 FR2827270 B1 FR 2827270B1
Authority
FR
France
Prior art keywords
microscopic parts
manufacturing
manufacturing microscopic
parts
microscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0109363A
Other languages
French (fr)
Other versions
FR2827270A1 (en
Inventor
Tarik Bourouina
Takahisa Masuzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0109363A priority Critical patent/FR2827270B1/en
Priority to PCT/FR2002/002488 priority patent/WO2003007026A1/en
Publication of FR2827270A1 publication Critical patent/FR2827270A1/en
Application granted granted Critical
Publication of FR2827270B1 publication Critical patent/FR2827270B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00388—Etch mask forming
    • B81C1/00404—Mask characterised by its size, orientation or shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Drying Of Semiconductors (AREA)
  • Micromachines (AREA)
FR0109363A 2001-07-13 2001-07-13 PROCESS FOR MANUFACTURING MICROSCOPIC PARTS Expired - Fee Related FR2827270B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0109363A FR2827270B1 (en) 2001-07-13 2001-07-13 PROCESS FOR MANUFACTURING MICROSCOPIC PARTS
PCT/FR2002/002488 WO2003007026A1 (en) 2001-07-13 2002-07-12 Method for producing microscopic components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0109363A FR2827270B1 (en) 2001-07-13 2001-07-13 PROCESS FOR MANUFACTURING MICROSCOPIC PARTS

Publications (2)

Publication Number Publication Date
FR2827270A1 FR2827270A1 (en) 2003-01-17
FR2827270B1 true FR2827270B1 (en) 2004-01-02

Family

ID=8865474

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0109363A Expired - Fee Related FR2827270B1 (en) 2001-07-13 2001-07-13 PROCESS FOR MANUFACTURING MICROSCOPIC PARTS

Country Status (2)

Country Link
FR (1) FR2827270B1 (en)
WO (1) WO2003007026A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1500975A3 (en) * 2003-07-21 2006-01-18 Ingeneric GmbH Process for the fabrication of optical microstructures
FR2875339B1 (en) * 2004-09-16 2006-12-08 St Microelectronics Sa MOS TRANSISTOR WITH DEFORMABLE GRID
NL1034489C2 (en) 2007-10-09 2009-04-14 Micronit Microfluidics Bv Methods for manufacturing a microstructure.
EP2937311B1 (en) * 2014-04-25 2019-08-21 Rolex Sa Method for manufacturing a reinforced timepiece component, corresponding timepiece component and timepiece
EP3656733A1 (en) * 2018-11-23 2020-05-27 Murata Manufacturing Co., Ltd. Method for etching recessed structures

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398082A1 (en) * 1989-05-19 1990-11-22 Siemens Aktiengesellschaft Method for optical lens production
JP3089870B2 (en) * 1992-12-28 2000-09-18 富士電機株式会社 Processing method of silicon substrate
CA2298492A1 (en) * 1999-02-19 2000-08-19 Hyun-Kuk Shin Micro-lens, combination micro-lens and vertical cavity surface emitting laser, and methods for manufacturing the same

Also Published As

Publication number Publication date
WO2003007026A1 (en) 2003-01-23
FR2827270A1 (en) 2003-01-17

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Legal Events

Date Code Title Description
ST Notification of lapse