FR2824679B1 - ELECTROSTATIC ACTUATOR - Google Patents

ELECTROSTATIC ACTUATOR

Info

Publication number
FR2824679B1
FR2824679B1 FR0106130A FR0106130A FR2824679B1 FR 2824679 B1 FR2824679 B1 FR 2824679B1 FR 0106130 A FR0106130 A FR 0106130A FR 0106130 A FR0106130 A FR 0106130A FR 2824679 B1 FR2824679 B1 FR 2824679B1
Authority
FR
France
Prior art keywords
electrostatic actuator
electrostatic
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0106130A
Other languages
French (fr)
Other versions
FR2824679A1 (en
Inventor
Amalia Gamier
Roberto Gemi
Goaer Xavier Le
Francois Valentin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PHS Mems
Original Assignee
PHS Mems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PHS Mems filed Critical PHS Mems
Priority to FR0106130A priority Critical patent/FR2824679B1/en
Priority to PCT/FR2002/001574 priority patent/WO2002091556A1/en
Publication of FR2824679A1 publication Critical patent/FR2824679A1/en
Application granted granted Critical
Publication of FR2824679B1 publication Critical patent/FR2824679B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
FR0106130A 2001-05-09 2001-05-09 ELECTROSTATIC ACTUATOR Expired - Fee Related FR2824679B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0106130A FR2824679B1 (en) 2001-05-09 2001-05-09 ELECTROSTATIC ACTUATOR
PCT/FR2002/001574 WO2002091556A1 (en) 2001-05-09 2002-05-07 Electrostatic actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0106130A FR2824679B1 (en) 2001-05-09 2001-05-09 ELECTROSTATIC ACTUATOR

Publications (2)

Publication Number Publication Date
FR2824679A1 FR2824679A1 (en) 2002-11-15
FR2824679B1 true FR2824679B1 (en) 2003-10-03

Family

ID=8863085

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0106130A Expired - Fee Related FR2824679B1 (en) 2001-05-09 2001-05-09 ELECTROSTATIC ACTUATOR

Country Status (2)

Country Link
FR (1) FR2824679B1 (en)
WO (1) WO2002091556A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9487386B2 (en) * 2013-01-16 2016-11-08 Infineon Technologies Ag Comb MEMS device and method of making a comb MEMS device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2095911B (en) * 1981-03-17 1985-02-13 Standard Telephones Cables Ltd Electrical switch device
FR2706075B1 (en) * 1993-06-02 1995-07-21 Lewiner Jacques Control device of the moving part actuator type retaining its orientation during movement.
DE19807214A1 (en) * 1998-02-20 1999-09-16 Siemens Ag Micromechanical electrostatic relay

Also Published As

Publication number Publication date
WO2002091556A1 (en) 2002-11-14
FR2824679A1 (en) 2002-11-15

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20070131