FR2809549B1 - Dispositif formant micromoteur ou microactionneur - Google Patents

Dispositif formant micromoteur ou microactionneur

Info

Publication number
FR2809549B1
FR2809549B1 FR0006677A FR0006677A FR2809549B1 FR 2809549 B1 FR2809549 B1 FR 2809549B1 FR 0006677 A FR0006677 A FR 0006677A FR 0006677 A FR0006677 A FR 0006677A FR 2809549 B1 FR2809549 B1 FR 2809549B1
Authority
FR
France
Prior art keywords
microactuator
micromotor
forming device
forming
microactuator forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0006677A
Other languages
English (en)
Other versions
FR2809549A1 (fr
Inventor
Lionel Buchaillot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0006677A priority Critical patent/FR2809549B1/fr
Publication of FR2809549A1 publication Critical patent/FR2809549A1/fr
Application granted granted Critical
Publication of FR2809549B1 publication Critical patent/FR2809549B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
FR0006677A 2000-05-25 2000-05-25 Dispositif formant micromoteur ou microactionneur Expired - Fee Related FR2809549B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0006677A FR2809549B1 (fr) 2000-05-25 2000-05-25 Dispositif formant micromoteur ou microactionneur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0006677A FR2809549B1 (fr) 2000-05-25 2000-05-25 Dispositif formant micromoteur ou microactionneur

Publications (2)

Publication Number Publication Date
FR2809549A1 FR2809549A1 (fr) 2001-11-30
FR2809549B1 true FR2809549B1 (fr) 2003-06-27

Family

ID=8850596

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0006677A Expired - Fee Related FR2809549B1 (fr) 2000-05-25 2000-05-25 Dispositif formant micromoteur ou microactionneur

Country Status (1)

Country Link
FR (1) FR2809549B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2883277B1 (fr) 2005-03-18 2007-05-11 Silmach Soc Par Actions Simpli Procede et dispositif pour deplacer un element a entrainer utilisant un element actionneur forme par gravure dans un materiau semi-conducteur
FR2883276B1 (fr) 2005-03-18 2007-05-11 Silmach Soc Par Actions Simpli Procede et dispositif pour deplacer un element a entrainer utilisant un element actionneur forme par gravure dans un materiau semi-conducteur

Also Published As

Publication number Publication date
FR2809549A1 (fr) 2001-11-30

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20140131