FR2802139B1 - DEVICE FOR TRANSFERRING AN OBJECT UNDER A CONTROLLED ATMOSPHERE BETWEEN A FIRST CHAMBER AND A SECOND CHAMBER - Google Patents

DEVICE FOR TRANSFERRING AN OBJECT UNDER A CONTROLLED ATMOSPHERE BETWEEN A FIRST CHAMBER AND A SECOND CHAMBER

Info

Publication number
FR2802139B1
FR2802139B1 FR9915737A FR9915737A FR2802139B1 FR 2802139 B1 FR2802139 B1 FR 2802139B1 FR 9915737 A FR9915737 A FR 9915737A FR 9915737 A FR9915737 A FR 9915737A FR 2802139 B1 FR2802139 B1 FR 2802139B1
Authority
FR
France
Prior art keywords
chamber
transferring
object under
controlled atmosphere
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9915737A
Other languages
French (fr)
Other versions
FR2802139A1 (en
Inventor
Andre Dillinger
Joseph Marco
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR9915737A priority Critical patent/FR2802139B1/en
Publication of FR2802139A1 publication Critical patent/FR2802139A1/en
Application granted granted Critical
Publication of FR2802139B1 publication Critical patent/FR2802139B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
FR9915737A 1999-12-14 1999-12-14 DEVICE FOR TRANSFERRING AN OBJECT UNDER A CONTROLLED ATMOSPHERE BETWEEN A FIRST CHAMBER AND A SECOND CHAMBER Expired - Fee Related FR2802139B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9915737A FR2802139B1 (en) 1999-12-14 1999-12-14 DEVICE FOR TRANSFERRING AN OBJECT UNDER A CONTROLLED ATMOSPHERE BETWEEN A FIRST CHAMBER AND A SECOND CHAMBER

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9915737A FR2802139B1 (en) 1999-12-14 1999-12-14 DEVICE FOR TRANSFERRING AN OBJECT UNDER A CONTROLLED ATMOSPHERE BETWEEN A FIRST CHAMBER AND A SECOND CHAMBER

Publications (2)

Publication Number Publication Date
FR2802139A1 FR2802139A1 (en) 2001-06-15
FR2802139B1 true FR2802139B1 (en) 2002-02-15

Family

ID=9553225

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9915737A Expired - Fee Related FR2802139B1 (en) 1999-12-14 1999-12-14 DEVICE FOR TRANSFERRING AN OBJECT UNDER A CONTROLLED ATMOSPHERE BETWEEN A FIRST CHAMBER AND A SECOND CHAMBER

Country Status (1)

Country Link
FR (1) FR2802139B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4992660A (en) * 1989-06-26 1991-02-12 Jeol Ltd. Scanning tunneling microscope
FR2662024B1 (en) * 1990-05-10 1992-10-23 Spiral Rech & Dev INSTALLATION FOR THE STUDY OR TRANSFORMATION OF THE SURFACE OF SAMPLES PLACED IN A VACUUM OR IN A CONTROLLED ATMOSPHERE.
JP3407101B2 (en) * 1997-08-21 2003-05-19 科学技術振興事業団 A microscope that can be observed simultaneously with an electron microscope and a scanning tunneling microscope under ultra-high vacuum
DE19837851C1 (en) * 1998-08-20 1999-09-23 Max Planck Gesellschaft Apparatus and method for transferring a sample from a reaction vessel into ultrahigh vacuum

Also Published As

Publication number Publication date
FR2802139A1 (en) 2001-06-15

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20100831