FR2792083B1 - Systeme de regulation de pression d'une enceinte sous vide, groupe de pompage a vide pourvu d'un tel systeme - Google Patents

Systeme de regulation de pression d'une enceinte sous vide, groupe de pompage a vide pourvu d'un tel systeme

Info

Publication number
FR2792083B1
FR2792083B1 FR9904539A FR9904539A FR2792083B1 FR 2792083 B1 FR2792083 B1 FR 2792083B1 FR 9904539 A FR9904539 A FR 9904539A FR 9904539 A FR9904539 A FR 9904539A FR 2792083 B1 FR2792083 B1 FR 2792083B1
Authority
FR
France
Prior art keywords
vacuum
pressure regulation
group provided
pumping group
enclosure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9904539A
Other languages
English (en)
Other versions
FR2792083A1 (fr
Inventor
Claude Rousseau
Patrick Pilotti
Philippe Maquin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9904539A priority Critical patent/FR2792083B1/fr
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Priority to AT00400956T priority patent/ATE280406T1/de
Priority to PCT/FR2000/000886 priority patent/WO2000060428A1/fr
Priority to EP00400956A priority patent/EP1043645B1/fr
Priority to JP2000609856A priority patent/JP2002541541A/ja
Priority to US09/700,917 priority patent/US6419455B1/en
Priority to DE60015003T priority patent/DE60015003T2/de
Publication of FR2792083A1 publication Critical patent/FR2792083A1/fr
Application granted granted Critical
Publication of FR2792083B1 publication Critical patent/FR2792083B1/fr
Priority to JP2010178625A priority patent/JP2011008804A/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2066—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using controlling means acting on the pressure source
    • G05D16/2073—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using controlling means acting on the pressure source with a plurality of pressure sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0209—Rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
FR9904539A 1999-04-07 1999-04-12 Systeme de regulation de pression d'une enceinte sous vide, groupe de pompage a vide pourvu d'un tel systeme Expired - Fee Related FR2792083B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR9904539A FR2792083B1 (fr) 1999-04-12 1999-04-12 Systeme de regulation de pression d'une enceinte sous vide, groupe de pompage a vide pourvu d'un tel systeme
PCT/FR2000/000886 WO2000060428A1 (fr) 1999-04-07 2000-04-07 Systeme de regulation de pression d'une enceinte sous vide, groupe de pompage a vide pourvu d'un tel systeme
EP00400956A EP1043645B1 (fr) 1999-04-07 2000-04-07 Système de régulation de pression d'une enceinte sous vide, groupe de pompage à vide pourvu d'un tel système
JP2000609856A JP2002541541A (ja) 1999-04-07 2000-04-07 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット
AT00400956T ATE280406T1 (de) 1999-04-07 2000-04-07 Druckregelvorrichtung für eine vakuumkammer, und eine mit einer solchen vorrichtung versehenen vakuumpumpeinheit
US09/700,917 US6419455B1 (en) 1999-04-07 2000-04-07 System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
DE60015003T DE60015003T2 (de) 1999-04-07 2000-04-07 Druckregelvorrichtung für eine Vakuumkammer, und eine mit einer solchen Vorrichtung versehenen Vakuumpumpeinheit
JP2010178625A JP2011008804A (ja) 1999-04-07 2010-08-09 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9904539A FR2792083B1 (fr) 1999-04-12 1999-04-12 Systeme de regulation de pression d'une enceinte sous vide, groupe de pompage a vide pourvu d'un tel systeme

Publications (2)

Publication Number Publication Date
FR2792083A1 FR2792083A1 (fr) 2000-10-13
FR2792083B1 true FR2792083B1 (fr) 2003-08-01

Family

ID=9544285

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9904539A Expired - Fee Related FR2792083B1 (fr) 1999-04-07 1999-04-12 Systeme de regulation de pression d'une enceinte sous vide, groupe de pompage a vide pourvu d'un tel systeme

Country Status (1)

Country Link
FR (1) FR2792083B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
BE1023392B1 (nl) * 2015-08-31 2017-03-01 Atlas Copco Airpower Naamloze Vennootschap Werkwijze voor het regelen van het toerental van een compressor in functie van het beschikbaar gasdebiet van een bron en sturing en compressor daarbij toegepast.
GB2599160A (en) * 2020-09-29 2022-03-30 Leybold Gmbh Method for operating a pump system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61116081A (ja) * 1984-11-12 1986-06-03 Toshiba Corp ポンプ制御装置
US4699570A (en) * 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
DD262065A1 (de) * 1987-07-07 1988-11-16 Univ Dresden Tech Vorrichtung zur druckregelung im feinvakuumbereich
FR2652390B1 (fr) * 1989-09-27 1991-11-29 Cit Alcatel Groupe de pompage a vide.
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber

Also Published As

Publication number Publication date
FR2792083A1 (fr) 2000-10-13

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse

Effective date: 20121228