FR2791469B1 - X-RAY IMAGING DEVICE AND METHOD FOR PRODUCING SUCH A DEVICE - Google Patents

X-RAY IMAGING DEVICE AND METHOD FOR PRODUCING SUCH A DEVICE

Info

Publication number
FR2791469B1
FR2791469B1 FR9903588A FR9903588A FR2791469B1 FR 2791469 B1 FR2791469 B1 FR 2791469B1 FR 9903588 A FR9903588 A FR 9903588A FR 9903588 A FR9903588 A FR 9903588A FR 2791469 B1 FR2791469 B1 FR 2791469B1
Authority
FR
France
Prior art keywords
producing
ray imaging
imaging device
ray
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9903588A
Other languages
French (fr)
Other versions
FR2791469A1 (en
Inventor
Loick Verger
Olivier Peyret
Marc Arques
Michel Wolny
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9903588A priority Critical patent/FR2791469B1/en
Priority to PCT/FR2000/000685 priority patent/WO2000057205A1/en
Priority to EP00911002A priority patent/EP1166150A1/en
Publication of FR2791469A1 publication Critical patent/FR2791469A1/en
Application granted granted Critical
Publication of FR2791469B1 publication Critical patent/FR2791469B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14643Photodiode arrays; MOS imagers
    • H01L27/14658X-ray, gamma-ray or corpuscular radiation imagers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14609Pixel-elements with integrated switching, control, storage or amplification elements
FR9903588A 1999-03-23 1999-03-23 X-RAY IMAGING DEVICE AND METHOD FOR PRODUCING SUCH A DEVICE Expired - Fee Related FR2791469B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR9903588A FR2791469B1 (en) 1999-03-23 1999-03-23 X-RAY IMAGING DEVICE AND METHOD FOR PRODUCING SUCH A DEVICE
PCT/FR2000/000685 WO2000057205A1 (en) 1999-03-23 2000-03-20 X-ray imaging device and method for making same
EP00911002A EP1166150A1 (en) 1999-03-23 2000-03-20 X-ray imaging device and method for making same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9903588A FR2791469B1 (en) 1999-03-23 1999-03-23 X-RAY IMAGING DEVICE AND METHOD FOR PRODUCING SUCH A DEVICE

Publications (2)

Publication Number Publication Date
FR2791469A1 FR2791469A1 (en) 2000-09-29
FR2791469B1 true FR2791469B1 (en) 2001-04-13

Family

ID=9543520

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9903588A Expired - Fee Related FR2791469B1 (en) 1999-03-23 1999-03-23 X-RAY IMAGING DEVICE AND METHOD FOR PRODUCING SUCH A DEVICE

Country Status (3)

Country Link
EP (1) EP1166150A1 (en)
FR (1) FR2791469B1 (en)
WO (1) WO2000057205A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7944012B2 (en) 2003-05-08 2011-05-17 The Science And Technology Facilities Council Accelerated particle and high energy radiation sensor
CN101861529B (en) 2007-10-04 2013-06-19 丹麦技术大学 A detector for detecting particle radiation of an energy in the range of 150 eV to 300 keV, and a materials mapping apparatus with such a detector

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5262649A (en) * 1989-09-06 1993-11-16 The Regents Of The University Of Michigan Thin-film, flat panel, pixelated detector array for real-time digital imaging and dosimetry of ionizing radiation
US5587591A (en) * 1993-12-29 1996-12-24 General Electric Company Solid state fluoroscopic radiation imager with thin film transistor addressable array
GB2289983B (en) * 1994-06-01 1996-10-16 Simage Oy Imaging devices,systems and methods
US5528043A (en) * 1995-04-21 1996-06-18 Thermotrex Corporation X-ray image sensor
GB2318411B (en) * 1996-10-15 1999-03-10 Simage Oy Imaging device for imaging radiation
GB2318448B (en) * 1996-10-18 2002-01-16 Simage Oy Imaging detector and method of production
GB2319394B (en) * 1996-12-27 1998-10-28 Simage Oy Bump-bonded semiconductor imaging device
GB2332585B (en) * 1997-12-18 2000-09-27 Simage Oy Device for imaging radiation

Also Published As

Publication number Publication date
WO2000057205A1 (en) 2000-09-28
FR2791469A1 (en) 2000-09-29
EP1166150A1 (en) 2002-01-02

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20101130