FR2779317B1 - Procede de modulation de la configuration d'un champ magnetique - Google Patents
Procede de modulation de la configuration d'un champ magnetiqueInfo
- Publication number
- FR2779317B1 FR2779317B1 FR9806578A FR9806578A FR2779317B1 FR 2779317 B1 FR2779317 B1 FR 2779317B1 FR 9806578 A FR9806578 A FR 9806578A FR 9806578 A FR9806578 A FR 9806578A FR 2779317 B1 FR2779317 B1 FR 2779317B1
- Authority
- FR
- France
- Prior art keywords
- modulating
- configuration
- magnetic field
- magnetic
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
- H05H1/16—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
- H05H1/18—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
- H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Particle Accelerators (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9806578A FR2779317B1 (fr) | 1998-05-26 | 1998-05-26 | Procede de modulation de la configuration d'un champ magnetique |
EP99920917A EP1080612A1 (fr) | 1998-05-26 | 1999-05-26 | Procede de modulation de la configuration d'un champ magnetique |
AU38315/99A AU3831599A (en) | 1998-05-26 | 1999-05-26 | Method for modulating a magnetic field configuration |
PCT/FR1999/001225 WO1999062306A1 (fr) | 1998-05-26 | 1999-05-26 | Procede de modulation de la configuration d'un champ magnetique |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9806578A FR2779317B1 (fr) | 1998-05-26 | 1998-05-26 | Procede de modulation de la configuration d'un champ magnetique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2779317A1 FR2779317A1 (fr) | 1999-12-03 |
FR2779317B1 true FR2779317B1 (fr) | 2000-08-18 |
Family
ID=9526694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9806578A Expired - Fee Related FR2779317B1 (fr) | 1998-05-26 | 1998-05-26 | Procede de modulation de la configuration d'un champ magnetique |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1080612A1 (fr) |
AU (1) | AU3831599A (fr) |
FR (1) | FR2779317B1 (fr) |
WO (1) | WO1999062306A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19933762C2 (de) * | 1999-07-19 | 2002-10-17 | Juergen Andrae | Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen |
US8158016B2 (en) | 2004-02-04 | 2012-04-17 | Veeco Instruments, Inc. | Methods of operating an electromagnet of an ion source |
US7557362B2 (en) | 2004-02-04 | 2009-07-07 | Veeco Instruments Inc. | Ion sources and methods for generating an ion beam with a controllable ion current density distribution |
JP5091258B2 (ja) * | 2007-02-26 | 2012-12-05 | ビーコ・インスツルメンツ・インコーポレーテッド | イオン源およびイオン源の電磁石を動作させる方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4952273A (en) * | 1988-09-21 | 1990-08-28 | Microscience, Inc. | Plasma generation in electron cyclotron resonance |
FR2701797B1 (fr) * | 1993-02-18 | 1995-03-31 | Commissariat Energie Atomique | Coupleur de transfert d'une puissance micro-onde vers une nappe de plasma et source micro-onde linéaire pour le traitement de surfaces par plasma . |
DE19641439C2 (de) * | 1995-04-08 | 2000-09-07 | Ehret Hans P | ECR-Ionen-Quelle |
DE19513345C2 (de) * | 1995-04-08 | 2000-08-03 | Ehret Hans P | ECR-Ionenquelle |
JPH1074729A (ja) * | 1996-08-30 | 1998-03-17 | Hitachi Ltd | プラズマエッチング方法 |
-
1998
- 1998-05-26 FR FR9806578A patent/FR2779317B1/fr not_active Expired - Fee Related
-
1999
- 1999-05-26 EP EP99920917A patent/EP1080612A1/fr not_active Withdrawn
- 1999-05-26 AU AU38315/99A patent/AU3831599A/en not_active Abandoned
- 1999-05-26 WO PCT/FR1999/001225 patent/WO1999062306A1/fr not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
FR2779317A1 (fr) | 1999-12-03 |
WO1999062306A1 (fr) | 1999-12-02 |
EP1080612A1 (fr) | 2001-03-07 |
AU3831599A (en) | 1999-12-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20070131 |