FR2766962B1 - THERMAL MICROSWITCH COMPATIBLE WITH AN INTEGRATED CIRCUIT - Google Patents

THERMAL MICROSWITCH COMPATIBLE WITH AN INTEGRATED CIRCUIT

Info

Publication number
FR2766962B1
FR2766962B1 FR9709915A FR9709915A FR2766962B1 FR 2766962 B1 FR2766962 B1 FR 2766962B1 FR 9709915 A FR9709915 A FR 9709915A FR 9709915 A FR9709915 A FR 9709915A FR 2766962 B1 FR2766962 B1 FR 2766962B1
Authority
FR
France
Prior art keywords
microswitch
compatible
thermal
integrated circuit
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9709915A
Other languages
French (fr)
Other versions
FR2766962A1 (en
Inventor
Jean Luc Morand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
SGS Thomson Microelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGS Thomson Microelectronics SA filed Critical SGS Thomson Microelectronics SA
Priority to FR9709915A priority Critical patent/FR2766962B1/en
Publication of FR2766962A1 publication Critical patent/FR2766962A1/en
Application granted granted Critical
Publication of FR2766962B1 publication Critical patent/FR2766962B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H2037/008—Micromechanical switches operated thermally
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H37/02—Details
    • H01H37/32—Thermally-sensitive members
    • H01H37/52—Thermally-sensitive members actuated due to deflection of bimetallic element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/04—Electrothermal relays wherein the thermally-sensitive member is only heated directly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H71/00—Details of the protective switches or relays covered by groups H01H73/00 - H01H83/00
    • H01H71/10—Operating or release mechanisms
    • H01H71/12—Automatic release mechanisms with or without manual release
    • H01H71/14—Electrothermal mechanisms
    • H01H71/16—Electrothermal mechanisms with bimetal element

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacture Of Switches (AREA)
FR9709915A 1997-07-29 1997-07-29 THERMAL MICROSWITCH COMPATIBLE WITH AN INTEGRATED CIRCUIT Expired - Fee Related FR2766962B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9709915A FR2766962B1 (en) 1997-07-29 1997-07-29 THERMAL MICROSWITCH COMPATIBLE WITH AN INTEGRATED CIRCUIT

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9709915A FR2766962B1 (en) 1997-07-29 1997-07-29 THERMAL MICROSWITCH COMPATIBLE WITH AN INTEGRATED CIRCUIT

Publications (2)

Publication Number Publication Date
FR2766962A1 FR2766962A1 (en) 1999-02-05
FR2766962B1 true FR2766962B1 (en) 1999-10-15

Family

ID=9509962

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9709915A Expired - Fee Related FR2766962B1 (en) 1997-07-29 1997-07-29 THERMAL MICROSWITCH COMPATIBLE WITH AN INTEGRATED CIRCUIT

Country Status (1)

Country Link
FR (1) FR2766962B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107265390A (en) * 2016-04-01 2017-10-20 英飞凌科技股份有限公司 For the MEMS heaters or emitter structures quickly heated and cooling is circulated

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6396382B1 (en) * 1999-09-10 2002-05-28 Levingard Technologies, Inc. Thermally actuated control device
FR2818795B1 (en) 2000-12-27 2003-12-05 Commissariat Energie Atomique MICRO-DEVICE WITH THERMAL ACTUATOR
EP1419511B1 (en) * 2001-08-20 2006-06-28 Honeywell International Inc. Snap action thermal switch
US10681777B2 (en) 2016-04-01 2020-06-09 Infineon Technologies Ag Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures
US10955599B2 (en) 2016-04-01 2021-03-23 Infineon Technologies Ag Light emitter devices, photoacoustic gas sensors and methods for forming light emitter devices

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4543457A (en) * 1984-01-25 1985-09-24 Transensory Devices, Inc. Microminiature force-sensitive switch
US5467068A (en) * 1994-07-07 1995-11-14 Hewlett-Packard Company Micromachined bi-material signal switch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107265390A (en) * 2016-04-01 2017-10-20 英飞凌科技股份有限公司 For the MEMS heaters or emitter structures quickly heated and cooling is circulated

Also Published As

Publication number Publication date
FR2766962A1 (en) 1999-02-05

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse

Effective date: 20070330