FR2760743B1 - NOVEL COPPER PRECURSORS (I) FOR CHEMICAL GAS DEPOSITION OF METAL COPPER - Google Patents

NOVEL COPPER PRECURSORS (I) FOR CHEMICAL GAS DEPOSITION OF METAL COPPER

Info

Publication number
FR2760743B1
FR2760743B1 FR9703029A FR9703029A FR2760743B1 FR 2760743 B1 FR2760743 B1 FR 2760743B1 FR 9703029 A FR9703029 A FR 9703029A FR 9703029 A FR9703029 A FR 9703029A FR 2760743 B1 FR2760743 B1 FR 2760743B1
Authority
FR
France
Prior art keywords
copper
pct
chemical gas
gas deposition
precursors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9703029A
Other languages
French (fr)
Other versions
FR2760743A1 (en
Inventor
Pascal Doppelt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9703029A priority Critical patent/FR2760743B1/en
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to DE69841824T priority patent/DE69841824D1/en
Priority to US09/380,948 priority patent/US6130345A/en
Priority to AT98914918T priority patent/ATE477258T1/en
Priority to CA002283160A priority patent/CA2283160C/en
Priority to EP98914918A priority patent/EP0966474B1/en
Priority to KR1019997008339A priority patent/KR100542913B1/en
Priority to PCT/FR1998/000518 priority patent/WO1998040387A1/en
Priority to JP53931198A priority patent/JP4388604B2/en
Priority to AU69233/98A priority patent/AU743343B2/en
Priority to TW087103811A priority patent/TW514671B/en
Publication of FR2760743A1 publication Critical patent/FR2760743A1/en
Application granted granted Critical
Publication of FR2760743B1 publication Critical patent/FR2760743B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic System
    • C07F1/08—Copper compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic System
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/0803—Compounds with Si-C or Si-Si linkages

Abstract

PCT No. PCT/FR98/00518 Sec. 371 Date Dec. 15, 1999 Sec. 102(e) Date Dec. 15, 1999 PCT Filed Mar. 13, 1998 PCT Pub. No. WO98/40387 PCT Pub. Date Sep. 17, 1998The invention concerns complex compounds of oxidised copper (+1) stabilised by a ligand for the gas phase chemical deposit of copper in which copper is coordinated with a beta -diketonate and the ligand is an alkyne of which the triple bond is partially deactivated by one or two groups slightly attracting the electrons by said alkyne.
FR9703029A 1997-03-13 1997-03-13 NOVEL COPPER PRECURSORS (I) FOR CHEMICAL GAS DEPOSITION OF METAL COPPER Expired - Lifetime FR2760743B1 (en)

Priority Applications (11)

Application Number Priority Date Filing Date Title
FR9703029A FR2760743B1 (en) 1997-03-13 1997-03-13 NOVEL COPPER PRECURSORS (I) FOR CHEMICAL GAS DEPOSITION OF METAL COPPER
JP53931198A JP4388604B2 (en) 1997-03-13 1998-03-13 A new copper (▲ I ▼) precursor for chemical vapor deposition of metallic copper
AT98914918T ATE477258T1 (en) 1997-03-13 1998-03-13 COPPER (I) PRECURSOR FOR CHEMICAL VAPOR DEPOSITION OF METALLIC COPPER
CA002283160A CA2283160C (en) 1997-03-13 1998-03-13 Novel copper(i) precursors for chemical deposit in gas phase of metallic copper
EP98914918A EP0966474B1 (en) 1997-03-13 1998-03-13 Novel copper(i) precursors for chemical deposit in gas phase of metallic copper
KR1019997008339A KR100542913B1 (en) 1997-03-13 1998-03-13 Novel CopperI Precursors For Chemical Deposit In Gas Phase Of Metallic Copper
DE69841824T DE69841824D1 (en) 1997-03-13 1998-03-13 COPPER (I) PRECIPITATOR FOR CHEMICAL STEAM PHASE DECOMPOSITION OF METALLIC COPPER
US09/380,948 US6130345A (en) 1997-03-13 1998-03-13 Copper (1) precursors for chemical deposit in gas phase of metallic copper
AU69233/98A AU743343B2 (en) 1997-03-13 1998-03-13 Novel copper(I) precursors for chemical deposit in gas phase of metallic copper
PCT/FR1998/000518 WO1998040387A1 (en) 1997-03-13 1998-03-13 Novel copper(i) precursors for chemical deposit in gas phase of metallic copper
TW087103811A TW514671B (en) 1997-03-13 1998-03-16 Novel precursors of Copper (I) for chemical deposition in gaseous phase of metallic copper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9703029A FR2760743B1 (en) 1997-03-13 1997-03-13 NOVEL COPPER PRECURSORS (I) FOR CHEMICAL GAS DEPOSITION OF METAL COPPER

Publications (2)

Publication Number Publication Date
FR2760743A1 FR2760743A1 (en) 1998-09-18
FR2760743B1 true FR2760743B1 (en) 1999-07-23

Family

ID=9504731

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9703029A Expired - Lifetime FR2760743B1 (en) 1997-03-13 1997-03-13 NOVEL COPPER PRECURSORS (I) FOR CHEMICAL GAS DEPOSITION OF METAL COPPER

Country Status (11)

Country Link
US (1) US6130345A (en)
EP (1) EP0966474B1 (en)
JP (1) JP4388604B2 (en)
KR (1) KR100542913B1 (en)
AT (1) ATE477258T1 (en)
AU (1) AU743343B2 (en)
CA (1) CA2283160C (en)
DE (1) DE69841824D1 (en)
FR (1) FR2760743B1 (en)
TW (1) TW514671B (en)
WO (1) WO1998040387A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6102993A (en) * 1998-08-03 2000-08-15 Advanced Technology Materials, Inc. Copper precursor composition and process for manufacture of microelectronic device structures
JP2002128787A (en) * 1999-12-15 2002-05-09 Mitsubishi Materials Corp Organocopper compound and mixed liquid containing the same and copper thin film made of the mixed liquid
US6596344B2 (en) * 2001-03-27 2003-07-22 Sharp Laboratories Of America, Inc. Method of depositing a high-adhesive copper thin film on a metal nitride substrate
US6534666B1 (en) * 2001-12-27 2003-03-18 Air Products And Chemicals, Inc. Use of water and acidic water to purify liquid MOCVD precursors
FR2839982B1 (en) * 2002-05-22 2005-04-15 Centre Nat Rech Scient PRECURSOR COMPOSITION FOR COPPER DEPOSITION ON A SUPPORT
TWI272273B (en) * 2002-07-16 2007-02-01 Sonus Pharma Inc Platinum compounds
FR2845088B1 (en) * 2002-09-30 2004-12-03 Centre Nat Rech Scient NOVEL FLUORINE-FREE METAL COMPLEXES FOR THE CHEMICAL DEPOSITION OF METALS IN THE GASEOUS PHASE
DE10319454A1 (en) * 2003-04-29 2004-11-18 Merck Patent Gmbh Dikupfer (I) oxalate complexes as a precursor for metallic copper deposition
US6838573B1 (en) * 2004-01-30 2005-01-04 Air Products And Chemicals, Inc. Copper CVD precursors with enhanced adhesion properties
WO2005090372A2 (en) * 2004-03-15 2005-09-29 Sonus Pharmaceuticals, Inc. Platinum carboxylate anticancer compounds

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1178290A (en) * 1981-07-13 1984-11-20 Gerald Doyle Copper or silver complexes with fluorinated diketonates and unsaturated hydrocarbons
US5096737A (en) 1990-10-24 1992-03-17 International Business Machines Corporation Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films
US5098516A (en) 1990-12-31 1992-03-24 Air Products And Chemicals, Inc. Processes for the chemical vapor deposition of copper and etching of copper
US5187300A (en) 1991-02-04 1993-02-16 Air Products And Chemicals, Inc. Volatile precursors for copper CVD
US5144049A (en) 1991-02-04 1992-09-01 Air Products And Chemicals, Inc. Volatile liquid precursors for the chemical vapor deposition of copper
US5085731A (en) 1991-02-04 1992-02-04 Air Products And Chemicals, Inc. Volatile liquid precursors for the chemical vapor deposition of copper
JP2622671B2 (en) * 1995-03-07 1997-06-18 株式会社トリケミカル研究所 Method for producing copper β-diketonate complex

Also Published As

Publication number Publication date
US6130345A (en) 2000-10-10
WO1998040387A1 (en) 1998-09-17
KR20000076244A (en) 2000-12-26
ATE477258T1 (en) 2010-08-15
AU743343B2 (en) 2002-01-24
CA2283160A1 (en) 1998-09-17
FR2760743A1 (en) 1998-09-18
TW514671B (en) 2002-12-21
EP0966474A1 (en) 1999-12-29
JP2001514644A (en) 2001-09-11
CA2283160C (en) 2009-11-03
JP4388604B2 (en) 2009-12-24
DE69841824D1 (en) 2010-09-23
AU6923398A (en) 1998-09-29
EP0966474B1 (en) 2010-08-11
KR100542913B1 (en) 2006-01-11

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