FR2759492B1 - Systeme de camera pour microscope electronique a transmission - Google Patents

Systeme de camera pour microscope electronique a transmission

Info

Publication number
FR2759492B1
FR2759492B1 FR9801425A FR9801425A FR2759492B1 FR 2759492 B1 FR2759492 B1 FR 2759492B1 FR 9801425 A FR9801425 A FR 9801425A FR 9801425 A FR9801425 A FR 9801425A FR 2759492 B1 FR2759492 B1 FR 2759492B1
Authority
FR
France
Prior art keywords
camera system
electronic microscope
transmission electronic
transmission
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9801425A
Other languages
English (en)
Other versions
FR2759492A1 (fr
Inventor
Ingo Daberkow
Manfred Schierjott
Jurgen Tumpner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soft Imaging System GmbH
Original Assignee
Soft Imaging System GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19752724A external-priority patent/DE19752724C2/de
Application filed by Soft Imaging System GmbH filed Critical Soft Imaging System GmbH
Publication of FR2759492A1 publication Critical patent/FR2759492A1/fr
Application granted granted Critical
Publication of FR2759492B1 publication Critical patent/FR2759492B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR9801425A 1997-02-07 1998-02-06 Systeme de camera pour microscope electronique a transmission Expired - Lifetime FR2759492B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19704723 1997-02-07
DE19752724A DE19752724C2 (de) 1997-02-07 1997-11-28 Kamerasystem für ein Transmissions-Elektronenmikroskop

Publications (2)

Publication Number Publication Date
FR2759492A1 FR2759492A1 (fr) 1998-08-14
FR2759492B1 true FR2759492B1 (fr) 2001-09-14

Family

ID=26033758

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9801425A Expired - Lifetime FR2759492B1 (fr) 1997-02-07 1998-02-06 Systeme de camera pour microscope electronique a transmission

Country Status (3)

Country Link
US (1) US6061085A (fr)
FR (1) FR2759492B1 (fr)
GB (1) GB2322032B (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7745786B2 (en) * 2008-03-19 2010-06-29 Fama Leo A Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
US7964846B2 (en) * 2008-08-01 2011-06-21 Gatan, Inc. Retractable lens-coupled electron microscope camera with image sensor in electron microscope vacuum chamber
FR2960699B1 (fr) * 2010-05-27 2013-05-10 Centre Nat Rech Scient Systeme de detection de cathodoluminescence souple et microscope mettant en oeuvre un tel systeme.
CN102637570A (zh) * 2012-04-10 2012-08-15 中国人民解放军南京军区福州总医院 一种侧装镜头耦合透射电镜数字成像装置
CN103151232B (zh) * 2013-03-08 2015-10-14 中国人民解放军南京军区福州总医院 一种侧装光纤耦合透射电镜数字成像方法及其装置
US9244025B2 (en) 2013-07-05 2016-01-26 Semiconductor Energy Laboratory Co., Ltd. Transmission electron diffraction measurement apparatus and method for measuring transmission electron diffraction pattern

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514629A (en) * 1982-07-07 1985-04-30 National Research Development Corporation Scanning transmission electron microscopes
JP2702114B2 (ja) * 1986-10-03 1998-01-21 株式会社日立製作所 電子顕微鏡
US4739399A (en) * 1987-08-06 1988-04-19 Gatan Inc. TV system for transmission electron microscopes
US5517033A (en) * 1994-07-25 1996-05-14 Gatan, Inc. Apparatus for improved image resolution in electron microscopy
US5536941A (en) * 1995-02-22 1996-07-16 Gatan, Inc. Rotatable wide angle camera and prism assembly for electron microscopes

Also Published As

Publication number Publication date
GB9801770D0 (en) 1998-03-25
FR2759492A1 (fr) 1998-08-14
GB2322032B (en) 2000-09-06
GB2322032A (en) 1998-08-12
US6061085A (en) 2000-05-09

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Legal Events

Date Code Title Description
TP Transmission of property
RM Correction of a material error
PLFP Fee payment

Year of fee payment: 19

PLFP Fee payment

Year of fee payment: 20