FR2755298B1 - METHOD AND DEVICE FOR PRECISE POSITIONING OF MONOCRYSTALLINE OBJECTS IN RELATION TO OTHERS ACCORDING TO THEIR CRYSTALLOGRAPHIC PLANS - Google Patents

METHOD AND DEVICE FOR PRECISE POSITIONING OF MONOCRYSTALLINE OBJECTS IN RELATION TO OTHERS ACCORDING TO THEIR CRYSTALLOGRAPHIC PLANS

Info

Publication number
FR2755298B1
FR2755298B1 FR9613255A FR9613255A FR2755298B1 FR 2755298 B1 FR2755298 B1 FR 2755298B1 FR 9613255 A FR9613255 A FR 9613255A FR 9613255 A FR9613255 A FR 9613255A FR 2755298 B1 FR2755298 B1 FR 2755298B1
Authority
FR
France
Prior art keywords
crystallographic
monocrystalline
plans
relation
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9613255A
Other languages
French (fr)
Other versions
FR2755298A1 (en
Inventor
Guy Rolland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9613255A priority Critical patent/FR2755298B1/en
Priority to PCT/FR1997/001942 priority patent/WO1998019329A1/en
Publication of FR2755298A1 publication Critical patent/FR2755298A1/en
Application granted granted Critical
Publication of FR2755298B1 publication Critical patent/FR2755298B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G01N23/20016—Goniometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR9613255A 1996-10-30 1996-10-30 METHOD AND DEVICE FOR PRECISE POSITIONING OF MONOCRYSTALLINE OBJECTS IN RELATION TO OTHERS ACCORDING TO THEIR CRYSTALLOGRAPHIC PLANS Expired - Fee Related FR2755298B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9613255A FR2755298B1 (en) 1996-10-30 1996-10-30 METHOD AND DEVICE FOR PRECISE POSITIONING OF MONOCRYSTALLINE OBJECTS IN RELATION TO OTHERS ACCORDING TO THEIR CRYSTALLOGRAPHIC PLANS
PCT/FR1997/001942 WO1998019329A1 (en) 1996-10-30 1997-10-29 Method and device for the accurate positioning of monocrystal objects relative to one another on the basis of their crystallographic planes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9613255A FR2755298B1 (en) 1996-10-30 1996-10-30 METHOD AND DEVICE FOR PRECISE POSITIONING OF MONOCRYSTALLINE OBJECTS IN RELATION TO OTHERS ACCORDING TO THEIR CRYSTALLOGRAPHIC PLANS

Publications (2)

Publication Number Publication Date
FR2755298A1 FR2755298A1 (en) 1998-04-30
FR2755298B1 true FR2755298B1 (en) 1999-02-26

Family

ID=9497180

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9613255A Expired - Fee Related FR2755298B1 (en) 1996-10-30 1996-10-30 METHOD AND DEVICE FOR PRECISE POSITIONING OF MONOCRYSTALLINE OBJECTS IN RELATION TO OTHERS ACCORDING TO THEIR CRYSTALLOGRAPHIC PLANS

Country Status (2)

Country Link
FR (1) FR2755298B1 (en)
WO (1) WO1998019329A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0719742B2 (en) * 1986-06-12 1995-03-06 三洋電機株式会社 Mask alignment method
JPH0713565B2 (en) * 1986-09-19 1995-02-15 三洋電機株式会社 Mask alignment method
JP2683933B2 (en) * 1989-01-20 1997-12-03 信越半導体株式会社 Inspection device for front and back and orientation of semiconductor wafer
JP2569862B2 (en) * 1990-02-13 1997-01-08 三菱電機株式会社 X-ray exposure apparatus and X-ray exposure method

Also Published As

Publication number Publication date
WO1998019329A1 (en) 1998-05-07
FR2755298A1 (en) 1998-04-30

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Legal Events

Date Code Title Description
ST Notification of lapse