FR2745822B1 - PROCESS FOR THE MANUFACTURE OF ALUMINUM OR ALUMINUM ALLOY ARTICLES FOR FORMING CATHODE SPRAY TARGETS - Google Patents

PROCESS FOR THE MANUFACTURE OF ALUMINUM OR ALUMINUM ALLOY ARTICLES FOR FORMING CATHODE SPRAY TARGETS

Info

Publication number
FR2745822B1
FR2745822B1 FR9603113A FR9603113A FR2745822B1 FR 2745822 B1 FR2745822 B1 FR 2745822B1 FR 9603113 A FR9603113 A FR 9603113A FR 9603113 A FR9603113 A FR 9603113A FR 2745822 B1 FR2745822 B1 FR 2745822B1
Authority
FR
France
Prior art keywords
aluminum
manufacture
alloy articles
aluminum alloy
forming cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9603113A
Other languages
French (fr)
Other versions
FR2745822A1 (en
Inventor
Michel Leroy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rio Tinto France SAS
Original Assignee
Aluminium Pechiney SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aluminium Pechiney SA filed Critical Aluminium Pechiney SA
Priority to FR9603113A priority Critical patent/FR2745822B1/en
Priority to JP11523996A priority patent/JPH09241837A/en
Priority to PCT/FR1997/000363 priority patent/WO1997033011A1/en
Publication of FR2745822A1 publication Critical patent/FR2745822A1/en
Application granted granted Critical
Publication of FR2745822B1 publication Critical patent/FR2745822B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/02—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working in inert or controlled atmosphere or vacuum
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
FR9603113A 1996-03-07 1996-03-07 PROCESS FOR THE MANUFACTURE OF ALUMINUM OR ALUMINUM ALLOY ARTICLES FOR FORMING CATHODE SPRAY TARGETS Expired - Fee Related FR2745822B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR9603113A FR2745822B1 (en) 1996-03-07 1996-03-07 PROCESS FOR THE MANUFACTURE OF ALUMINUM OR ALUMINUM ALLOY ARTICLES FOR FORMING CATHODE SPRAY TARGETS
JP11523996A JPH09241837A (en) 1996-03-07 1996-04-15 Rolled product for target and its production
PCT/FR1997/000363 WO1997033011A1 (en) 1996-03-07 1997-02-28 Method for making sputtering targets from an aluminium alloy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9603113A FR2745822B1 (en) 1996-03-07 1996-03-07 PROCESS FOR THE MANUFACTURE OF ALUMINUM OR ALUMINUM ALLOY ARTICLES FOR FORMING CATHODE SPRAY TARGETS

Publications (2)

Publication Number Publication Date
FR2745822A1 FR2745822A1 (en) 1997-09-12
FR2745822B1 true FR2745822B1 (en) 1998-04-17

Family

ID=9490114

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9603113A Expired - Fee Related FR2745822B1 (en) 1996-03-07 1996-03-07 PROCESS FOR THE MANUFACTURE OF ALUMINUM OR ALUMINUM ALLOY ARTICLES FOR FORMING CATHODE SPRAY TARGETS

Country Status (3)

Country Link
JP (1) JPH09241837A (en)
FR (1) FR2745822B1 (en)
WO (1) WO1997033011A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5651434B2 (en) * 2010-11-11 2015-01-14 株式会社アルバック Sputtering target material inspection method and sputtering target manufacturing method
CN108097722B (en) * 2017-12-08 2019-11-05 宁波江丰电子材料股份有限公司 A kind of Al-Sc alloy target material forming method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1842200A (en) * 1928-05-04 1932-01-19 Westinghouse Lamp Co Method of degasifying metal bodies
GB863788A (en) * 1958-07-17 1961-03-29 Aluminum Co Of America Method of producing substantially gas- and void-free aluminium and aluminium-base alloy articles
US5268236A (en) * 1988-11-25 1993-12-07 Vereinigte Aluminum-Werke Ag Composite aluminum plate for physical coating processes and methods for producing composite aluminum plate and target
DE3839775C2 (en) * 1988-11-25 1998-12-24 Vaw Ver Aluminium Werke Ag Cathode sputtering target and process for its manufacture
FR2664618B1 (en) * 1990-07-10 1993-10-08 Pechiney Aluminium PROCESS FOR THE MANUFACTURE OF CATHODES FOR CATHODE SPRAYING BASED ON VERY HIGH PURITY ALUMINUM.

Also Published As

Publication number Publication date
WO1997033011A1 (en) 1997-09-12
FR2745822A1 (en) 1997-09-12
JPH09241837A (en) 1997-09-16

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Legal Events

Date Code Title Description
ST Notification of lapse