FR2704693B1 - BASKET OF ENGRAVING. - Google Patents

BASKET OF ENGRAVING.

Info

Publication number
FR2704693B1
FR2704693B1 FR9304944A FR9304944A FR2704693B1 FR 2704693 B1 FR2704693 B1 FR 2704693B1 FR 9304944 A FR9304944 A FR 9304944A FR 9304944 A FR9304944 A FR 9304944A FR 2704693 B1 FR2704693 B1 FR 2704693B1
Authority
FR
France
Prior art keywords
engraving
basket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9304944A
Other languages
French (fr)
Other versions
FR2704693A1 (en
Inventor
Cointrel Jean-Pierre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Priority to FR9304944A priority Critical patent/FR2704693B1/en
Publication of FR2704693A1 publication Critical patent/FR2704693A1/en
Application granted granted Critical
Publication of FR2704693B1 publication Critical patent/FR2704693B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
FR9304944A 1993-04-27 1993-04-27 BASKET OF ENGRAVING. Expired - Fee Related FR2704693B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9304944A FR2704693B1 (en) 1993-04-27 1993-04-27 BASKET OF ENGRAVING.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9304944A FR2704693B1 (en) 1993-04-27 1993-04-27 BASKET OF ENGRAVING.

Publications (2)

Publication Number Publication Date
FR2704693A1 FR2704693A1 (en) 1994-11-04
FR2704693B1 true FR2704693B1 (en) 1995-07-13

Family

ID=9446478

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9304944A Expired - Fee Related FR2704693B1 (en) 1993-04-27 1993-04-27 BASKET OF ENGRAVING.

Country Status (1)

Country Link
FR (1) FR2704693B1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3552548A (en) * 1968-08-05 1971-01-05 Fluroware Inc Wafer storage and shipping container
US4589547A (en) * 1983-01-14 1986-05-20 Motorola Inc. Carrier for stacked semiconductor die
JP2539447B2 (en) * 1987-08-12 1996-10-02 株式会社日立製作所 Production method by single-wafer carrier
FR2663003B1 (en) * 1990-06-12 1992-09-11 Sgs Thomson Microelectronics CONTAINER FOR SEMICONDUCTOR WAFER.
WO1992008242A1 (en) * 1990-10-25 1992-05-14 Strong Leslie G Method and apparatus for transporting sensitive electronic components

Also Published As

Publication number Publication date
FR2704693A1 (en) 1994-11-04

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Legal Events

Date Code Title Description
ST Notification of lapse