FR2691836B1 - METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE COMPRISING AT LEAST ONE CHIP AND CORRESPONDING DEVICE. - Google Patents

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE COMPRISING AT LEAST ONE CHIP AND CORRESPONDING DEVICE.

Info

Publication number
FR2691836B1
FR2691836B1 FR9206518A FR9206518A FR2691836B1 FR 2691836 B1 FR2691836 B1 FR 2691836B1 FR 9206518 A FR9206518 A FR 9206518A FR 9206518 A FR9206518 A FR 9206518A FR 2691836 B1 FR2691836 B1 FR 2691836B1
Authority
FR
France
Prior art keywords
chip
manufacturing
semiconductor device
corresponding device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9206518A
Other languages
French (fr)
Other versions
FR2691836A1 (en
Inventor
Champenhout Yves Van
Dominiqueval Christian Gilet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sorin CRM SAS
Original Assignee
Ela Medical SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9206518A priority Critical patent/FR2691836B1/en
Application filed by Ela Medical SAS filed Critical Ela Medical SAS
Priority to US08/182,093 priority patent/US6307261B1/en
Priority to JP6500261A priority patent/JPH07508615A/en
Priority to ES93913073T priority patent/ES2296284T3/en
Priority to PCT/FR1993/000513 priority patent/WO1993024956A1/en
Priority to DE69334180T priority patent/DE69334180T2/en
Priority to EP93913073A priority patent/EP0642699B1/en
Publication of FR2691836A1 publication Critical patent/FR2691836A1/en
Application granted granted Critical
Publication of FR2691836B1 publication Critical patent/FR2691836B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5385—Assembly of a plurality of insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0652—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next and on each other, i.e. mixed assemblies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/27—Manufacturing methods
    • H01L2224/274—Manufacturing methods by blanket deposition of the material of the layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298—Multilayer circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
FR9206518A 1992-05-27 1992-05-27 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE COMPRISING AT LEAST ONE CHIP AND CORRESPONDING DEVICE. Expired - Lifetime FR2691836B1 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR9206518A FR2691836B1 (en) 1992-05-27 1992-05-27 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE COMPRISING AT LEAST ONE CHIP AND CORRESPONDING DEVICE.
JP6500261A JPH07508615A (en) 1992-05-27 1993-05-26 Method for manufacturing a semiconductor device including at least one chip and corresponding apparatus
ES93913073T ES2296284T3 (en) 1992-05-27 1993-05-26 MANUFACTURING PROCEDURE OF A DEVICE WITH SEMICONDUCTORS UNDERSTANDING AT LEAST ONE PAD, AND CORRESPONDING DEVICE.
PCT/FR1993/000513 WO1993024956A1 (en) 1992-05-27 1993-05-26 Process for the manufacture of a solid-state device including at least one chip, and corresponding device
US08/182,093 US6307261B1 (en) 1992-05-27 1993-05-26 Method for the manufacturing of a semiconductor device which comprises at least one chip and corresponding device
DE69334180T DE69334180T2 (en) 1992-05-27 1993-05-26 METHOD FOR PRODUCING A SEMICONDUCTOR COMPONENT WITH AT LEAST ONE CHIP AND CORRESPONDING COMPONENT.
EP93913073A EP0642699B1 (en) 1992-05-27 1993-05-26 Process for the manufacture of a solid-state device including at least one chip, and corresponding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9206518A FR2691836B1 (en) 1992-05-27 1992-05-27 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE COMPRISING AT LEAST ONE CHIP AND CORRESPONDING DEVICE.

Publications (2)

Publication Number Publication Date
FR2691836A1 FR2691836A1 (en) 1993-12-03
FR2691836B1 true FR2691836B1 (en) 1997-04-30

Family

ID=9430251

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9206518A Expired - Lifetime FR2691836B1 (en) 1992-05-27 1992-05-27 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE COMPRISING AT LEAST ONE CHIP AND CORRESPONDING DEVICE.

Country Status (7)

Country Link
US (1) US6307261B1 (en)
EP (1) EP0642699B1 (en)
JP (1) JPH07508615A (en)
DE (1) DE69334180T2 (en)
ES (1) ES2296284T3 (en)
FR (1) FR2691836B1 (en)
WO (1) WO1993024956A1 (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL106892A0 (en) * 1993-09-02 1993-12-28 Pierre Badehi Methods and apparatus for producing integrated circuit devices
IL108359A (en) * 1994-01-17 2001-04-30 Shellcase Ltd Method and apparatus for producing integrated circuit devices
US6329711B1 (en) 1995-11-08 2001-12-11 Fujitsu Limited Semiconductor device and mounting structure
US6159770A (en) * 1995-11-08 2000-12-12 Fujitsu Limited Method and apparatus for fabricating semiconductor device
US6376921B1 (en) 1995-11-08 2002-04-23 Fujitsu Limited Semiconductor device, method for fabricating the semiconductor device, lead frame and method for producing the lead frame
US6072239A (en) 1995-11-08 2000-06-06 Fujitsu Limited Device having resin package with projections
US6881611B1 (en) * 1996-07-12 2005-04-19 Fujitsu Limited Method and mold for manufacturing semiconductor device, semiconductor device and method for mounting the device
US20010003049A1 (en) * 1996-07-12 2001-06-07 Norio Fukasawa Method and mold for manufacturing semiconductor device, semiconductor device, and method for mounting the device
FR2771551B1 (en) * 1997-11-21 2000-01-28 Ela Medical Sa MICROELECTROMECHANICAL COMPONENT, SUCH AS A MICROSENSOR OR MICROACTUATOR, POSSIBLE ON A HYBRID CIRCUIT SUBSTRATE
FR2772516B1 (en) * 1997-12-12 2003-07-04 Ela Medical Sa ELECTRONIC CIRCUIT, IN PARTICULAR FOR AN ACTIVE IMPLANTABLE MEDICAL DEVICE SUCH AS A CARDIAC STIMULATOR OR DEFIBRILLATOR, AND ITS MANUFACTURING METHOD
IL123207A0 (en) 1998-02-06 1998-09-24 Shellcase Ltd Integrated circuit device
FR2802706B1 (en) * 1999-12-15 2002-03-01 3D Plus Sa METHOD AND DEVICE FOR THREE-DIMENSIONAL INTERCONNECTION OF ELECTRONIC COMPONENTS
DE60030963D1 (en) * 2000-06-06 2006-11-09 St Microelectronics Srl Electronic semiconductor module with heat distributor
EP1356718A4 (en) * 2000-12-21 2009-12-02 Tessera Tech Hungary Kft Packaged integrated circuits and methods of producing thereof
FR2832136B1 (en) * 2001-11-09 2005-02-18 3D Plus Sa DEVICE FOR HERMETIC ENCAPSULATION OF COMPONENT TO BE PROTECTED FROM ANY STRESS
FR2857157B1 (en) * 2003-07-01 2005-09-23 3D Plus Sa METHOD FOR INTERCONNECTING ACTIVE AND PASSIVE COMPONENTS AND HETEROGENEOUS COMPONENT WITH LOW THICKNESS THEREFROM
US7466012B2 (en) 2004-09-13 2008-12-16 International Rectifier Corporation Power semiconductor package
FR2875672B1 (en) * 2004-09-21 2007-05-11 3D Plus Sa Sa ELECTRONIC DEVICE WITH INTEGRATED HEAT DISTRIBUTOR
FR2884049B1 (en) * 2005-04-01 2007-06-22 3D Plus Sa Sa LOW THICK ELECTRONIC MODULE COMPRISING A STACK OF CONNECTING BIT ELECTRONIC BOXES
US7566853B2 (en) * 2005-08-12 2009-07-28 Tessera, Inc. Image sensor employing a plurality of photodetector arrays and/or rear-illuminated architecture
FR2894070B1 (en) * 2005-11-30 2008-04-11 3D Plus Sa Sa 3D ELECTRONIC MODULE
FR2895568B1 (en) * 2005-12-23 2008-02-08 3D Plus Sa Sa COLLECTIVE MANUFACTURING METHOD OF 3D ELECTRONIC MODULES
FR2905198B1 (en) * 2006-08-22 2008-10-17 3D Plus Sa Sa COLLECTIVE MANUFACTURING METHOD OF 3D ELECTRONIC MODULES
DE102006048583B3 (en) * 2006-10-13 2008-01-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Component has two connections and four side surfaces with contact areas, where two side surfaces are opposite to each other, and contact areas of opposite side surfaces are connected with different connections
US7807508B2 (en) * 2006-10-31 2010-10-05 Tessera Technologies Hungary Kft. Wafer-level fabrication of lidded chips with electrodeposited dielectric coating
FR2911995B1 (en) * 2007-01-30 2009-03-06 3D Plus Sa Sa METHOD FOR INTERCONNECTING ELECTRONIC WAFERS
FR2923081B1 (en) * 2007-10-26 2009-12-11 3D Plus PROCESS FOR VERTICAL INTERCONNECTION OF 3D ELECTRONIC MODULES BY VIAS.
FR2940521B1 (en) 2008-12-19 2011-11-11 3D Plus COLLECTIVE MANUFACTURING METHOD OF ELECTRONIC MODULES FOR SURFACE MOUNTING
FR2943176B1 (en) 2009-03-10 2011-08-05 3D Plus METHOD FOR POSITIONING CHIPS WHEN MANUFACTURING A RECONSTITUTED PLATE

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113235A (en) * 1980-12-29 1982-07-14 Nec Corp Semiconductor device
JPS5891649A (en) * 1981-11-26 1983-05-31 Toshiba Corp Manufacture of semiconductor device
US4667219A (en) * 1984-04-27 1987-05-19 Trilogy Computer Development Partners, Ltd. Semiconductor chip interface
SE458537B (en) 1986-09-02 1989-04-10 Goeranstroemberg DEVICE FOR BUILDINGS
US5054192A (en) * 1987-05-21 1991-10-08 Cray Computer Corporation Lead bonding of chips to circuit boards and circuit boards to circuit boards
FR2622741A1 (en) * 1987-11-04 1989-05-05 Nec Corp Structure for connecting substrates with different thermal expansion coefficients
US4926241A (en) * 1988-02-19 1990-05-15 Microelectronics And Computer Technology Corporation Flip substrate for chip mount
ES2087968T3 (en) * 1990-03-23 1996-08-01 At & T Corp INTEGRATED CIRCUIT INTERCONNECTION.
US5065227A (en) * 1990-06-04 1991-11-12 International Business Machines Corporation Integrated circuit packaging using flexible substrate
JPH0563029A (en) * 1991-09-02 1993-03-12 Fujitsu Ltd Semiconductor device

Also Published As

Publication number Publication date
US6307261B1 (en) 2001-10-23
JPH07508615A (en) 1995-09-21
WO1993024956A1 (en) 1993-12-09
EP0642699B1 (en) 2007-11-07
DE69334180T2 (en) 2008-08-28
FR2691836A1 (en) 1993-12-03
EP0642699A1 (en) 1995-03-15
ES2296284T3 (en) 2008-04-16
DE69334180D1 (en) 2007-12-20

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Legal Events

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AU Other action affecting the ownership or exploitation of an industrial property right
TP Transmission of property
CD Change of name or company name