FR2689642A1 - Capteur d'accélération du type capacitif omnidirectionnel dans un plan principal. - Google Patents

Capteur d'accélération du type capacitif omnidirectionnel dans un plan principal. Download PDF

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Publication number
FR2689642A1
FR2689642A1 FR9204081A FR9204081A FR2689642A1 FR 2689642 A1 FR2689642 A1 FR 2689642A1 FR 9204081 A FR9204081 A FR 9204081A FR 9204081 A FR9204081 A FR 9204081A FR 2689642 A1 FR2689642 A1 FR 2689642A1
Authority
FR
France
Prior art keywords
mass
support
acceleration
pole
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR9204081A
Other languages
English (en)
French (fr)
Other versions
FR2689642B1 (enrdf_load_stackoverflow
Inventor
Dufour Michel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9204081A priority Critical patent/FR2689642A1/fr
Publication of FR2689642A1 publication Critical patent/FR2689642A1/fr
Application granted granted Critical
Publication of FR2689642B1 publication Critical patent/FR2689642B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
FR9204081A 1992-04-03 1992-04-03 Capteur d'accélération du type capacitif omnidirectionnel dans un plan principal. Granted FR2689642A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9204081A FR2689642A1 (fr) 1992-04-03 1992-04-03 Capteur d'accélération du type capacitif omnidirectionnel dans un plan principal.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9204081A FR2689642A1 (fr) 1992-04-03 1992-04-03 Capteur d'accélération du type capacitif omnidirectionnel dans un plan principal.

Publications (2)

Publication Number Publication Date
FR2689642A1 true FR2689642A1 (fr) 1993-10-08
FR2689642B1 FR2689642B1 (enrdf_load_stackoverflow) 1997-02-07

Family

ID=9428447

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9204081A Granted FR2689642A1 (fr) 1992-04-03 1992-04-03 Capteur d'accélération du type capacitif omnidirectionnel dans un plan principal.

Country Status (1)

Country Link
FR (1) FR2689642A1 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0660119A1 (en) * 1993-12-27 1995-06-28 Hitachi, Ltd. Acceleration sensor
EP0754952A3 (en) * 1995-07-17 1997-04-23 Murata Manufacturing Co Impact sensor
WO2004106943A1 (en) * 2003-05-27 2004-12-09 Eidgenössische Technische Hochschule Zürich Accelerometer system
CN101568840B (zh) * 2006-12-27 2013-01-02 罗伯特·博世有限公司 微机械多轴加速度传感器
EP3398629A1 (en) * 2009-11-03 2018-11-07 Medtronic Minimed, Inc. Omnidirectional accelerometer device and medical device incorporating same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3363470A (en) * 1964-07-20 1968-01-16 Raphael O. Yavne Accelerometer
US3710629A (en) * 1970-07-22 1973-01-16 Singer Co Three-axis accelerometer
DE2905858A1 (de) * 1979-02-15 1980-08-21 Ralf Burmester Beschleunigungsgrenzwertschalter
US4414848A (en) * 1981-08-13 1983-11-15 Rockwell International Corporation Three-axis accelerometer
WO1990000735A1 (en) * 1988-07-14 1990-01-25 University Of Hawaii Multidimensional force sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3363470A (en) * 1964-07-20 1968-01-16 Raphael O. Yavne Accelerometer
US3710629A (en) * 1970-07-22 1973-01-16 Singer Co Three-axis accelerometer
DE2905858A1 (de) * 1979-02-15 1980-08-21 Ralf Burmester Beschleunigungsgrenzwertschalter
US4414848A (en) * 1981-08-13 1983-11-15 Rockwell International Corporation Three-axis accelerometer
WO1990000735A1 (en) * 1988-07-14 1990-01-25 University Of Hawaii Multidimensional force sensor

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0660119A1 (en) * 1993-12-27 1995-06-28 Hitachi, Ltd. Acceleration sensor
US6305223B1 (en) 1993-12-27 2001-10-23 Hitachi, Ltd. Acceleration sensor
US6388887B1 (en) 1993-12-27 2002-05-14 Hitachi, Ltd. Surface mount type package unit
US6463804B2 (en) 1993-12-27 2002-10-15 Hitachi, Ltd. Acceleration sensor
US6561030B2 (en) 1993-12-27 2003-05-13 Hitachi, Ltd. Acceleration sensor
US6566742B1 (en) 1993-12-27 2003-05-20 Hitachi, Ltd. Structure for mounting components
EP0754952A3 (en) * 1995-07-17 1997-04-23 Murata Manufacturing Co Impact sensor
US6053045A (en) * 1995-07-17 2000-04-25 Murata Manufacturing Co., Ltd. Impact sensor
WO2004106943A1 (en) * 2003-05-27 2004-12-09 Eidgenössische Technische Hochschule Zürich Accelerometer system
CN101568840B (zh) * 2006-12-27 2013-01-02 罗伯特·博世有限公司 微机械多轴加速度传感器
US8429971B2 (en) 2006-12-27 2013-04-30 Robert Bosch Gmbh Multiaxial micromechanical acceleration sensor
EP3398629A1 (en) * 2009-11-03 2018-11-07 Medtronic Minimed, Inc. Omnidirectional accelerometer device and medical device incorporating same

Also Published As

Publication number Publication date
FR2689642B1 (enrdf_load_stackoverflow) 1997-02-07

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