FR2688887B1 - Appareil de controle d'etat de surface d'une piece metallique par courant photo-electrique en milieu ambiant. - Google Patents
Appareil de controle d'etat de surface d'une piece metallique par courant photo-electrique en milieu ambiant.Info
- Publication number
- FR2688887B1 FR2688887B1 FR9203369A FR9203369A FR2688887B1 FR 2688887 B1 FR2688887 B1 FR 2688887B1 FR 9203369 A FR9203369 A FR 9203369A FR 9203369 A FR9203369 A FR 9203369A FR 2688887 B1 FR2688887 B1 FR 2688887B1
- Authority
- FR
- France
- Prior art keywords
- controlling
- metal part
- surface condition
- ambient environment
- photoelectric current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/20—Metals
- G01N33/204—Structure thereof, e.g. crystal structure
- G01N33/2045—Defects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/084—Investigating materials by wave or particle radiation secondary emission photo-electric effect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/61—Specific applications or type of materials thin films, coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/645—Specific applications or type of materials quality control
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/646—Specific applications or type of materials flaws, defects
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9203369A FR2688887B1 (fr) | 1992-03-20 | 1992-03-20 | Appareil de controle d'etat de surface d'une piece metallique par courant photo-electrique en milieu ambiant. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9203369A FR2688887B1 (fr) | 1992-03-20 | 1992-03-20 | Appareil de controle d'etat de surface d'une piece metallique par courant photo-electrique en milieu ambiant. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2688887A1 FR2688887A1 (fr) | 1993-09-24 |
| FR2688887B1 true FR2688887B1 (fr) | 1996-12-20 |
Family
ID=9427893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR9203369A Expired - Fee Related FR2688887B1 (fr) | 1992-03-20 | 1992-03-20 | Appareil de controle d'etat de surface d'une piece metallique par courant photo-electrique en milieu ambiant. |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2688887B1 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1116932A3 (fr) * | 2000-01-14 | 2003-04-16 | Leica Microsystems Wetzlar GmbH | Appareil de mesure et méthode pour mesurer des structures sur un substrat |
| CN100437099C (zh) * | 2003-09-29 | 2008-11-26 | 丰田自动车株式会社 | 钢材的表面质量的检查方法 |
| JP2005257538A (ja) | 2004-03-12 | 2005-09-22 | Riken Keiki Co Ltd | 光電子測定装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4590376A (en) * | 1984-05-30 | 1986-05-20 | Photo Acoustic Technology, Inc. | Apparatus and technique for monitoring photoelectron emission from surfaces |
| US4988877A (en) * | 1989-10-03 | 1991-01-29 | Tencor Instruments | Via hole checker |
-
1992
- 1992-03-20 FR FR9203369A patent/FR2688887B1/fr not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| FR2688887A1 (fr) | 1993-09-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |
Effective date: 20061130 |