FR2681949B1 - ELECTRON BEAM ANALYZER. - Google Patents

ELECTRON BEAM ANALYZER.

Info

Publication number
FR2681949B1
FR2681949B1 FR9112090A FR9112090A FR2681949B1 FR 2681949 B1 FR2681949 B1 FR 2681949B1 FR 9112090 A FR9112090 A FR 9112090A FR 9112090 A FR9112090 A FR 9112090A FR 2681949 B1 FR2681949 B1 FR 2681949B1
Authority
FR
France
Prior art keywords
electron beam
beam analyzer
analyzer
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9112090A
Other languages
French (fr)
Other versions
FR2681949A1 (en
Inventor
Alain Strasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STRASBOURG ELECTRICITE
Original Assignee
STRASBOURG ELECTRICITE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STRASBOURG ELECTRICITE filed Critical STRASBOURG ELECTRICITE
Priority to FR9112090A priority Critical patent/FR2681949B1/en
Publication of FR2681949A1 publication Critical patent/FR2681949A1/en
Application granted granted Critical
Publication of FR2681949B1 publication Critical patent/FR2681949B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914—Measurement of spatial distribution of radiation
FR9112090A 1991-09-27 1991-09-27 ELECTRON BEAM ANALYZER. Expired - Fee Related FR2681949B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9112090A FR2681949B1 (en) 1991-09-27 1991-09-27 ELECTRON BEAM ANALYZER.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9112090A FR2681949B1 (en) 1991-09-27 1991-09-27 ELECTRON BEAM ANALYZER.

Publications (2)

Publication Number Publication Date
FR2681949A1 FR2681949A1 (en) 1993-04-02
FR2681949B1 true FR2681949B1 (en) 1994-01-14

Family

ID=9417489

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9112090A Expired - Fee Related FR2681949B1 (en) 1991-09-27 1991-09-27 ELECTRON BEAM ANALYZER.

Country Status (1)

Country Link
FR (1) FR2681949B1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2591036A1 (en) * 1985-12-04 1987-06-05 Balteau DEVICE FOR DETECTING AND LOCATING NEUTRAL PARTICLES, AND APPLICATIONS
US4724321A (en) * 1986-08-11 1988-02-09 The United States Of America As Represented By The Secretary Of The Army Beam intensity monitor for a high energy particle beam system

Also Published As

Publication number Publication date
FR2681949A1 (en) 1993-04-02

Similar Documents

Publication Publication Date Title
FR2662301B1 (en) ELECTRON EMITTING ELEMENT.
DE69233781D1 (en) electron beam device
DE69318269D1 (en) Focusing electron detector
DE69320617T2 (en) Electron emitter
DE69432098D1 (en) Electron beam lithography system
DE3574521D1 (en) ELECTRON BEAM LITHOGRAPHY DEVICE.
DE69406739T2 (en) Electron beam device
DE69101797T2 (en) Electron tube cathode.
DE69001653D1 (en) ELECTRON BEAM GENERATOR.
DE59303531D1 (en) Electron beam device
GB2243943B (en) Electron beam tube arrangements
DE69213157D1 (en) Electron beam device
GB2244854B (en) Electron beam tube arrangements
DE69108092D1 (en) Electron beam welding.
DE68919004D1 (en) Electron microscope.
DE69213868D1 (en) Electron beam gun
DE69011908D1 (en) Focusing an electron beam.
FR2706078B1 (en) Electron beam tube.
EP0463829A3 (en) Electron beam evaporation source
DE69208583T2 (en) Electron beam lithography process
FR2704093B1 (en) Linear electron beam tube.
GB2277195B (en) Electron beam tube arrangements
GB9307552D0 (en) Electron beam tube arrangement
FR2681949B1 (en) ELECTRON BEAM ANALYZER.
EP0505862A3 (en) Electron beam tube

Legal Events

Date Code Title Description
ST Notification of lapse