FR2677841B1 - REACTOR FOR GAS PHASE PLASMA DEPOSITION OF INORGANIC COMPOUNDS ON A POLYMERIC SUBSTRATE. - Google Patents
REACTOR FOR GAS PHASE PLASMA DEPOSITION OF INORGANIC COMPOUNDS ON A POLYMERIC SUBSTRATE.Info
- Publication number
- FR2677841B1 FR2677841B1 FR9107138A FR9107138A FR2677841B1 FR 2677841 B1 FR2677841 B1 FR 2677841B1 FR 9107138 A FR9107138 A FR 9107138A FR 9107138 A FR9107138 A FR 9107138A FR 2677841 B1 FR2677841 B1 FR 2677841B1
- Authority
- FR
- France
- Prior art keywords
- reactor
- gas phase
- inorganic compounds
- polymeric substrate
- plasma deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9107138A FR2677841B1 (en) | 1991-06-12 | 1991-06-12 | REACTOR FOR GAS PHASE PLASMA DEPOSITION OF INORGANIC COMPOUNDS ON A POLYMERIC SUBSTRATE. |
JP4151668A JPH05331648A (en) | 1991-06-12 | 1992-06-11 | Reactor for plasma deposition of inorganic compound in gas phase on polymer substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9107138A FR2677841B1 (en) | 1991-06-12 | 1991-06-12 | REACTOR FOR GAS PHASE PLASMA DEPOSITION OF INORGANIC COMPOUNDS ON A POLYMERIC SUBSTRATE. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2677841A1 FR2677841A1 (en) | 1992-12-18 |
FR2677841B1 true FR2677841B1 (en) | 1997-01-10 |
Family
ID=9413732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9107138A Expired - Fee Related FR2677841B1 (en) | 1991-06-12 | 1991-06-12 | REACTOR FOR GAS PHASE PLASMA DEPOSITION OF INORGANIC COMPOUNDS ON A POLYMERIC SUBSTRATE. |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH05331648A (en) |
FR (1) | FR2677841B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102388680A (en) * | 2009-02-05 | 2012-03-21 | 苏舍美特科公司 | Plasma coating system and method for coating or treating the surface of a substrate |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5620523A (en) * | 1994-04-11 | 1997-04-15 | Canon Sales Co., Inc. | Apparatus for forming film |
FR2766321B1 (en) * | 1997-07-16 | 1999-09-03 | Air Liquide | SURFACE WAVE PLASMA GAS EXCITATION DEVICE |
DE19943064B4 (en) * | 1999-09-09 | 2013-01-31 | Robert Bosch Gmbh | A method of epitaxially depositing atoms or molecules from a reactive gas on a deposition surface of a substrate |
US20150118855A1 (en) * | 2013-10-30 | 2015-04-30 | Nisene Technology Group | Microwave induced plasma decapsulation |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2614317B1 (en) * | 1987-04-22 | 1989-07-13 | Air Liquide | PROCESS FOR PROTECTING POLYMERIC SUBSTRATE BY PLASMA DEPOSITION OF COMPOUNDS OF THE SILICON OXYNITRIDE TYPE AND DEVICE FOR IMPLEMENTING SAME. |
FR2616030A1 (en) * | 1987-06-01 | 1988-12-02 | Commissariat Energie Atomique | PLASMA ETCHING OR DEPOSITION METHOD AND DEVICE FOR IMPLEMENTING THE METHOD |
FR2653633B1 (en) * | 1989-10-19 | 1991-12-20 | Commissariat Energie Atomique | CHEMICAL TREATMENT DEVICE ASSISTED BY A DIFFUSION PLASMA. |
-
1991
- 1991-06-12 FR FR9107138A patent/FR2677841B1/en not_active Expired - Fee Related
-
1992
- 1992-06-11 JP JP4151668A patent/JPH05331648A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102388680A (en) * | 2009-02-05 | 2012-03-21 | 苏舍美特科公司 | Plasma coating system and method for coating or treating the surface of a substrate |
RU2536818C2 (en) * | 2009-02-05 | 2014-12-27 | Зульцер Метко Аг | Coating plasma sprayer and method of coating application or that of substrate processing |
Also Published As
Publication number | Publication date |
---|---|
JPH05331648A (en) | 1993-12-14 |
FR2677841A1 (en) | 1992-12-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0723601A4 (en) | A method for chemical vapor deposition of titanium nitride films at low temperatures | |
FR2708924B1 (en) | Method of depositing a layer of metallic nitride on a transparent substrate. | |
DE69205494T2 (en) | Coating system for plasma chemical vapor deposition. | |
FR2698882B1 (en) | Method for forming a protective coating on a substrate. | |
ZA928331B (en) | Apparatus for depositing on a substrate by chemical vapour deposition. | |
ES2040161A1 (en) | Binder enriched cvd and pvd coated cutting tool. | |
FR2614317B1 (en) | PROCESS FOR PROTECTING POLYMERIC SUBSTRATE BY PLASMA DEPOSITION OF COMPOUNDS OF THE SILICON OXYNITRIDE TYPE AND DEVICE FOR IMPLEMENTING SAME. | |
GB9711080D0 (en) | Film or coating deposition on a substrate | |
EP0659904A3 (en) | Vaporized hydrogen silsesquioxane for depositing a coating. | |
CA2210599A1 (en) | Process for depositing barrier film on three-dimensional articles | |
GB2106939B (en) | Installation for the deposition of thin layers in the reactive vapour phase by plasma | |
FR2707671B1 (en) | Method and device for introducing precursors into a chemical vapor deposition chamber. | |
FR2670693B1 (en) | PROCESS FOR CLEANING THE SURFACE OF A SUBSTRATE BY PLASMA. | |
TW402166U (en) | Device for deposition of thin layers on a substrate | |
FR2599558B1 (en) | METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE, INCLUDING THE DEPOSITION IN VAPOR PHASE OF LAYERS ON A SUBSTRATE | |
EP0444253A3 (en) | Apparatus for the deposition of thin layers on a substrate | |
EP0630989A3 (en) | Method of plasma chemical vapor deposition of layer with improved interface. | |
FR2677841B1 (en) | REACTOR FOR GAS PHASE PLASMA DEPOSITION OF INORGANIC COMPOUNDS ON A POLYMERIC SUBSTRATE. | |
FR2673633B1 (en) | MULTILAYER COATING FOR POLYCARBONATE SUBSTRATE. | |
FI920733A (en) | Apparatus for coating a substrate | |
EP0604075A3 (en) | Production of a hard coated substrate. | |
AU8312091A (en) | Chemical vapor deposition (cvd) process for plasma depositing silicon carbide films onto a substrate | |
FR2695410B1 (en) | Process for pretreatment of a substrate for the selective deposition of tungsten. | |
FR2724853B1 (en) | DEVICE FOR DISPENSING POWDERY SOLIDS ON THE SURFACE OF A SUBSTRATE FOR LAYING A COATING | |
AU8318191A (en) | Chemical vapor deposition (cvd) process for thermally depositing silicone carbide films onto a substrate |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |