FR2676542B1 - Cellule piezometrique et son procede de scellement. - Google Patents
Cellule piezometrique et son procede de scellement.Info
- Publication number
- FR2676542B1 FR2676542B1 FR9106125A FR9106125A FR2676542B1 FR 2676542 B1 FR2676542 B1 FR 2676542B1 FR 9106125 A FR9106125 A FR 9106125A FR 9106125 A FR9106125 A FR 9106125A FR 2676542 B1 FR2676542 B1 FR 2676542B1
- Authority
- FR
- France
- Prior art keywords
- piezometric
- cell
- sealing method
- sealing
- piezometric cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9106125A FR2676542B1 (fr) | 1991-05-17 | 1991-05-17 | Cellule piezometrique et son procede de scellement. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9106125A FR2676542B1 (fr) | 1991-05-17 | 1991-05-17 | Cellule piezometrique et son procede de scellement. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2676542A1 FR2676542A1 (fr) | 1992-11-20 |
FR2676542B1 true FR2676542B1 (fr) | 1993-09-17 |
Family
ID=9412970
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9106125A Expired - Fee Related FR2676542B1 (fr) | 1991-05-17 | 1991-05-17 | Cellule piezometrique et son procede de scellement. |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2676542B1 (fr) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4064550A (en) * | 1976-03-22 | 1977-12-20 | Hewlett-Packard Company | High fidelity pressure transducer |
DE3137219A1 (de) * | 1981-09-18 | 1983-04-07 | Robert Bosch Gmbh, 7000 Stuttgart | Kapazitiver drucksensor und verfahren zu seiner herstellung |
US4490773A (en) * | 1983-12-19 | 1984-12-25 | United Technologies Corporation | Capacitive pressure transducer |
US4972717A (en) * | 1989-09-18 | 1990-11-27 | Texas Instruments Incorporated | Pressure transducer apparatus and method for making same |
-
1991
- 1991-05-17 FR FR9106125A patent/FR2676542B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2676542A1 (fr) | 1992-11-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |