FR2668676B2 - Dispositif perfectionne pour l'application de micro-ondes. - Google Patents

Dispositif perfectionne pour l'application de micro-ondes.

Info

Publication number
FR2668676B2
FR2668676B2 FR9013645A FR9013645A FR2668676B2 FR 2668676 B2 FR2668676 B2 FR 2668676B2 FR 9013645 A FR9013645 A FR 9013645A FR 9013645 A FR9013645 A FR 9013645A FR 2668676 B2 FR2668676 B2 FR 2668676B2
Authority
FR
France
Prior art keywords
improved device
applying microwave
microwave
applying
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9013645A
Other languages
English (en)
Other versions
FR2668676A2 (fr
Inventor
Claude Marzat
Rodolphe Decourt
Bernadette Duport
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite des Sciences et Tech (Bordeaux 1)
Original Assignee
Universite des Sciences et Tech (Bordeaux 1)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR8608332A external-priority patent/FR2599924B1/fr
Application filed by Universite des Sciences et Tech (Bordeaux 1) filed Critical Universite des Sciences et Tech (Bordeaux 1)
Priority to FR9013645A priority Critical patent/FR2668676B2/fr
Publication of FR2668676A2 publication Critical patent/FR2668676A2/fr
Application granted granted Critical
Publication of FR2668676B2 publication Critical patent/FR2668676B2/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32247—Resonators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/32—Drying solid materials or objects by processes involving the application of heat by development of heat within the materials or objects to be dried, e.g. by fermentation or other microbiological action
    • F26B3/34—Drying solid materials or objects by processes involving the application of heat by development of heat within the materials or objects to be dried, e.g. by fermentation or other microbiological action by using electrical effects
    • F26B3/347—Electromagnetic heating, e.g. induction heating or heating using microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electromagnetism (AREA)
  • Microbiology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Biotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
FR9013645A 1986-06-06 1990-10-31 Dispositif perfectionne pour l'application de micro-ondes. Expired - Lifetime FR2668676B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9013645A FR2668676B2 (fr) 1986-06-06 1990-10-31 Dispositif perfectionne pour l'application de micro-ondes.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8608332A FR2599924B1 (fr) 1986-06-06 1986-06-06 Dispositif modulaire pour l'application de micro-ondes en vue notamment du chauffage, sechage ou torrefaction d'un materiau
FR9013645A FR2668676B2 (fr) 1986-06-06 1990-10-31 Dispositif perfectionne pour l'application de micro-ondes.

Publications (2)

Publication Number Publication Date
FR2668676A2 FR2668676A2 (fr) 1992-04-30
FR2668676B2 true FR2668676B2 (fr) 1993-06-11

Family

ID=26225301

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9013645A Expired - Lifetime FR2668676B2 (fr) 1986-06-06 1990-10-31 Dispositif perfectionne pour l'application de micro-ondes.

Country Status (1)

Country Link
FR (1) FR2668676B2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2694474B1 (fr) * 1992-07-29 1994-10-14 Onera (Off Nat Aerospatiale) Réacteur à plasma à micro-ondes et appareil de dépôt incorporant un tel réacteur.
DE4235914A1 (de) * 1992-10-23 1994-04-28 Juergen Prof Dr Engemann Vorrichtung zur Erzeugung von Mikrowellenplasmen
DE19600223A1 (de) * 1996-01-05 1997-07-17 Ralf Dr Dipl Phys Spitzl Vorrichtung zur Erzeugung von Plasmen mittels Mikrowellen
DE19608949A1 (de) * 1996-03-08 1997-09-11 Ralf Dr Spitzl Vorrichtung zur Erzeugung von leistungsfähigen Mikrowellenplasmen
US5834744A (en) * 1997-09-08 1998-11-10 The Rubbright Group Tubular microwave applicator
US8674275B2 (en) * 2007-06-29 2014-03-18 Corning Incorporated Method of fabricating a honeycomb structure using microwaves

Also Published As

Publication number Publication date
FR2668676A2 (fr) 1992-04-30

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