FR2662497B1 - Appareil de mesure de fluide destine a etre utilise dans un appareil de distribution de fluide. - Google Patents

Appareil de mesure de fluide destine a etre utilise dans un appareil de distribution de fluide.

Info

Publication number
FR2662497B1
FR2662497B1 FR9006401A FR9006401A FR2662497B1 FR 2662497 B1 FR2662497 B1 FR 2662497B1 FR 9006401 A FR9006401 A FR 9006401A FR 9006401 A FR9006401 A FR 9006401A FR 2662497 B1 FR2662497 B1 FR 2662497B1
Authority
FR
France
Prior art keywords
fluid
measuring apparatus
fluid delivery
delivery apparatus
fluid measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9006401A
Other languages
English (en)
Other versions
FR2662497A1 (fr
Inventor
Gabriel Prono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Freescale Semiconducteurs France SAS
Original Assignee
Motorola Semiconducteurs SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Semiconducteurs SA filed Critical Motorola Semiconducteurs SA
Priority to FR9006401A priority Critical patent/FR2662497B1/fr
Publication of FR2662497A1 publication Critical patent/FR2662497A1/fr
Application granted granted Critical
Publication of FR2662497B1 publication Critical patent/FR2662497B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Volume Flow (AREA)
FR9006401A 1990-05-22 1990-05-22 Appareil de mesure de fluide destine a etre utilise dans un appareil de distribution de fluide. Expired - Fee Related FR2662497B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9006401A FR2662497B1 (fr) 1990-05-22 1990-05-22 Appareil de mesure de fluide destine a etre utilise dans un appareil de distribution de fluide.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9006401A FR2662497B1 (fr) 1990-05-22 1990-05-22 Appareil de mesure de fluide destine a etre utilise dans un appareil de distribution de fluide.

Publications (2)

Publication Number Publication Date
FR2662497A1 FR2662497A1 (fr) 1991-11-29
FR2662497B1 true FR2662497B1 (fr) 1993-12-10

Family

ID=9396857

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9006401A Expired - Fee Related FR2662497B1 (fr) 1990-05-22 1990-05-22 Appareil de mesure de fluide destine a etre utilise dans un appareil de distribution de fluide.

Country Status (1)

Country Link
FR (1) FR2662497B1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550368Y2 (fr) * 1978-03-03 1980-11-22
US4285245A (en) * 1979-12-06 1981-08-25 Precision Machine Products, Inc. Method and apparatus for measuring and controlling volumetric flow rate of gases in a line
DE3244668A1 (de) * 1982-12-02 1984-06-07 F.W. Oventrop Arn. Sohn Kg, 5787 Olsberg Verfahren und vorrichtung zur erfassung der durchflussmengen von durch rohrleitungen gefuehrten fluiden medien
GB2188158A (en) * 1986-03-20 1987-09-23 Cambridge Instr Inc Flowmeter
JPS62263415A (ja) * 1986-05-12 1987-11-16 Akio Inoshita 壁圧測定による汎用流量測定法

Also Published As

Publication number Publication date
FR2662497A1 (fr) 1991-11-29

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Legal Events

Date Code Title Description
ST Notification of lapse