FR2629008B1 - METHOD AND DEVICE FOR CLAVING A SILICON WAFER - Google Patents

METHOD AND DEVICE FOR CLAVING A SILICON WAFER

Info

Publication number
FR2629008B1
FR2629008B1 FR8803794A FR8803794A FR2629008B1 FR 2629008 B1 FR2629008 B1 FR 2629008B1 FR 8803794 A FR8803794 A FR 8803794A FR 8803794 A FR8803794 A FR 8803794A FR 2629008 B1 FR2629008 B1 FR 2629008B1
Authority
FR
France
Prior art keywords
claving
silicon wafer
wafer
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8803794A
Other languages
French (fr)
Other versions
FR2629008A1 (en
Inventor
Claude Cornu
Andre Poinard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR8803794A priority Critical patent/FR2629008B1/en
Priority to DE8989400793T priority patent/DE68901566D1/en
Priority to EP19890400793 priority patent/EP0334751B1/en
Publication of FR2629008A1 publication Critical patent/FR2629008A1/en
Application granted granted Critical
Publication of FR2629008B1 publication Critical patent/FR2629008B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
    • B28D5/0023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rectilinearly
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0052—Means for supporting or holding work during breaking

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR8803794A 1988-03-23 1988-03-23 METHOD AND DEVICE FOR CLAVING A SILICON WAFER Expired - Lifetime FR2629008B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR8803794A FR2629008B1 (en) 1988-03-23 1988-03-23 METHOD AND DEVICE FOR CLAVING A SILICON WAFER
DE8989400793T DE68901566D1 (en) 1988-03-23 1989-03-21 METHOD AND DEVICE FOR SPLITTING SILICON WAFERS.
EP19890400793 EP0334751B1 (en) 1988-03-23 1989-03-21 Method and device for cleaving a silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8803794A FR2629008B1 (en) 1988-03-23 1988-03-23 METHOD AND DEVICE FOR CLAVING A SILICON WAFER

Publications (2)

Publication Number Publication Date
FR2629008A1 FR2629008A1 (en) 1989-09-29
FR2629008B1 true FR2629008B1 (en) 1991-10-11

Family

ID=9364560

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8803794A Expired - Lifetime FR2629008B1 (en) 1988-03-23 1988-03-23 METHOD AND DEVICE FOR CLAVING A SILICON WAFER

Country Status (3)

Country Link
EP (1) EP0334751B1 (en)
DE (1) DE68901566D1 (en)
FR (1) FR2629008B1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03181131A (en) * 1989-12-11 1991-08-07 Naoetsu Denshi Kogyo Kk Method and apparatus for forming reinforcing material of semiconductor wafer
US7262115B2 (en) 2005-08-26 2007-08-28 Dynatex International Method and apparatus for breaking semiconductor wafers
US10773420B2 (en) 2011-11-10 2020-09-15 LatticeGear, LLC Device and method for cleaving a substrate
US10065340B2 (en) 2011-11-10 2018-09-04 LatticeGear, LLC Device and method for cleaving
CN103713102B (en) * 2013-12-30 2015-04-29 哈尔滨工业大学 Two-dimensional large-stroke linkage device for repairing surface micro defects of large-caliber optical element
CN105082385A (en) * 2015-08-10 2015-11-25 浙江辉弘光电能源有限公司 Positioning supporting base for silicon ingot clamp
CN107527841A (en) * 2017-08-25 2017-12-29 浙江羿阳太阳能科技有限公司 A kind of silicon chip production processing unit (plant)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3790051A (en) * 1971-09-07 1974-02-05 Radiant Energy Systems Semiconductor wafer fracturing technique employing a pressure controlled roller
FR2192481A5 (en) * 1972-07-13 1974-02-08 Bosonnet Mauric
GB2063149B (en) * 1979-11-13 1983-02-16 Arndrove Fabrications Ltd Pressure-applying hand tools for severing a scored ceramic tile
US4498451A (en) * 1983-08-05 1985-02-12 At&T Technologies, Inc. Cutting articles along known planes
US4653680A (en) * 1985-04-25 1987-03-31 Regan Barrie F Apparatus for breaking semiconductor wafers and the like

Also Published As

Publication number Publication date
DE68901566D1 (en) 1992-06-25
EP0334751A1 (en) 1989-09-27
FR2629008A1 (en) 1989-09-29
EP0334751B1 (en) 1992-05-20

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Legal Events

Date Code Title Description
ST Notification of lapse