FR2610406B1 - CAPACITIVE PRESSURE SENSOR - Google Patents
CAPACITIVE PRESSURE SENSORInfo
- Publication number
- FR2610406B1 FR2610406B1 FR8701271A FR8701271A FR2610406B1 FR 2610406 B1 FR2610406 B1 FR 2610406B1 FR 8701271 A FR8701271 A FR 8701271A FR 8701271 A FR8701271 A FR 8701271A FR 2610406 B1 FR2610406 B1 FR 2610406B1
- Authority
- FR
- France
- Prior art keywords
- pressure sensor
- capacitive pressure
- capacitive
- sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8701271A FR2610406B1 (en) | 1987-02-03 | 1987-02-03 | CAPACITIVE PRESSURE SENSOR |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8701271A FR2610406B1 (en) | 1987-02-03 | 1987-02-03 | CAPACITIVE PRESSURE SENSOR |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2610406A1 FR2610406A1 (en) | 1988-08-05 |
FR2610406B1 true FR2610406B1 (en) | 1989-09-08 |
Family
ID=9347527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8701271A Expired FR2610406B1 (en) | 1987-02-03 | 1987-02-03 | CAPACITIVE PRESSURE SENSOR |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2610406B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69412769T2 (en) * | 1993-12-07 | 1999-01-14 | Matsushita Electric Ind Co Ltd | Capacitive sensor and manufacturing method |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3703828A (en) * | 1969-11-05 | 1972-11-28 | Globe Universal Sciences | Capacitance variometer |
GB1354025A (en) * | 1970-05-25 | 1974-06-05 | Medicor Muevek | Capacitive pressure transducer |
GB1367935A (en) * | 1971-04-25 | 1974-09-25 | Cape Eng Co Ltd | Capacitive transducer |
FR2172802A1 (en) * | 1972-02-22 | 1973-10-05 | Herve Marcel | |
GB2125167B (en) * | 1982-07-15 | 1986-06-04 | Tekflo Ltd | Electrical fluid pressure transducer diaphragms |
JPS59148841A (en) * | 1983-02-15 | 1984-08-25 | Matsushita Electric Ind Co Ltd | Pressure sensor |
-
1987
- 1987-02-03 FR FR8701271A patent/FR2610406B1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2610406A1 (en) | 1988-08-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GC | Lien (pledge) constituted | ||
TP | Transmission of property | ||
CA | Change of address | ||
TP | Transmission of property | ||
ST | Notification of lapse |