FR2608837B1 - Appareil de manipulation en translation d'un element, tel qu'un axe - Google Patents

Appareil de manipulation en translation d'un element, tel qu'un axe

Info

Publication number
FR2608837B1
FR2608837B1 FR868618244A FR8618244A FR2608837B1 FR 2608837 B1 FR2608837 B1 FR 2608837B1 FR 868618244 A FR868618244 A FR 868618244A FR 8618244 A FR8618244 A FR 8618244A FR 2608837 B1 FR2608837 B1 FR 2608837B1
Authority
FR
France
Prior art keywords
shaft
handling translation
translation
handling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR868618244A
Other languages
English (en)
French (fr)
Other versions
FR2608837A1 (fr
Inventor
Jean Francois Muller
Francois Georges Tollitte
Gabriel Krier
Serge Dominiak
Andre Eberhardt
Marcel Berveiller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite Paul Verlaine-Metz
Original Assignee
Universite Paul Verlaine-Metz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR868618244A priority Critical patent/FR2608837B1/fr
Application filed by Universite Paul Verlaine-Metz filed Critical Universite Paul Verlaine-Metz
Priority to US07/249,573 priority patent/US4879467A/en
Priority to CH3119/88A priority patent/CH675849A5/fr
Priority to PCT/FR1987/000509 priority patent/WO1988004599A1/fr
Priority to DE3790816A priority patent/DE3790816C2/de
Priority to GB8814669A priority patent/GB2207654B/en
Priority to JP63501144A priority patent/JP2697757B2/ja
Priority to DE19873790816 priority patent/DE3790816T1/de
Publication of FR2608837A1 publication Critical patent/FR2608837A1/fr
Application granted granted Critical
Publication of FR2608837B1 publication Critical patent/FR2608837B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1085—Programme-controlled manipulators characterised by positioning means for manipulator elements positioning by means of shape-memory materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
FR868618244A 1986-12-23 1986-12-23 Appareil de manipulation en translation d'un element, tel qu'un axe Expired - Fee Related FR2608837B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR868618244A FR2608837B1 (fr) 1986-12-23 1986-12-23 Appareil de manipulation en translation d'un element, tel qu'un axe
CH3119/88A CH675849A5 (US06566495-20030520-M00011.png) 1986-12-23 1987-12-22
PCT/FR1987/000509 WO1988004599A1 (fr) 1986-12-23 1987-12-22 Appareil de manipulation en translation d'un element, tel qu'un axe
DE3790816A DE3790816C2 (de) 1986-12-23 1987-12-22 Manipulator zur Verschiebung eines Elementes, beispielsweise einer Welle
US07/249,573 US4879467A (en) 1986-12-23 1987-12-22 Apparatus for the translatory manipulation of an element such as an axle
GB8814669A GB2207654B (en) 1986-12-23 1987-12-22 Apparatus for the manipulation in translation of an element such as a spindle
JP63501144A JP2697757B2 (ja) 1986-12-23 1987-12-22 軸のような部材の並進移動操作を行う装置
DE19873790816 DE3790816T1 (US06566495-20030520-M00011.png) 1986-12-23 1987-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR868618244A FR2608837B1 (fr) 1986-12-23 1986-12-23 Appareil de manipulation en translation d'un element, tel qu'un axe

Publications (2)

Publication Number Publication Date
FR2608837A1 FR2608837A1 (fr) 1988-06-24
FR2608837B1 true FR2608837B1 (fr) 1994-06-10

Family

ID=9342348

Family Applications (1)

Application Number Title Priority Date Filing Date
FR868618244A Expired - Fee Related FR2608837B1 (fr) 1986-12-23 1986-12-23 Appareil de manipulation en translation d'un element, tel qu'un axe

Country Status (7)

Country Link
US (1) US4879467A (US06566495-20030520-M00011.png)
JP (1) JP2697757B2 (US06566495-20030520-M00011.png)
CH (1) CH675849A5 (US06566495-20030520-M00011.png)
DE (2) DE3790816C2 (US06566495-20030520-M00011.png)
FR (1) FR2608837B1 (US06566495-20030520-M00011.png)
GB (1) GB2207654B (US06566495-20030520-M00011.png)
WO (1) WO1988004599A1 (US06566495-20030520-M00011.png)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3814616A1 (de) * 1988-04-29 1989-11-09 Fraunhofer Ges Forschung Mikromanipulator zur bewegung von objekten
US5231291A (en) * 1989-08-01 1993-07-27 Canon Kabushiki Kaisha Wafer table and exposure apparatus with the same
JPH07122218A (ja) * 1993-10-26 1995-05-12 Ryoden Semiconductor Syst Eng Kk 走査プローブ顕微鏡ヘッドの試料台
AU6013100A (en) * 2000-01-21 2001-07-31 Surendra Shah A novel electro-thermal control device
CN108705469A (zh) * 2018-06-13 2018-10-26 哈尔滨理工大学 一种适用于扫描电子显微镜的多直径有孔刀片检测夹具

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2760405A (en) * 1952-05-05 1956-08-28 Ernest Leitz G M B H Micromanipulator
US3403575A (en) * 1966-03-14 1968-10-01 Basic Products Corp Micromanipulator
FR2032026A5 (US06566495-20030520-M00011.png) * 1969-02-17 1970-11-20 Beaudouin Ets
JPS491058B1 (US06566495-20030520-M00011.png) * 1969-09-24 1974-01-11
JPS5112497B1 (US06566495-20030520-M00011.png) * 1971-04-21 1976-04-20
SU497551A1 (ru) * 1973-06-26 1975-12-30 Московский институт электронной техники Устройство дл ориентации
US4162401A (en) * 1978-05-17 1979-07-24 The United States Of America As Represented By The United States Department Of Energy High-resolution, cryogenic, side-entry type specimen stage
US4191053A (en) * 1978-11-30 1980-03-04 Delta Materials Research Limited Temperature-responsive actuator
US4376581A (en) * 1979-12-20 1983-03-15 Censor Patent- Und Versuchs-Anstalt Method of positioning disk-shaped workpieces, preferably semiconductor wafers
US4506154A (en) * 1982-10-22 1985-03-19 Scire Fredric E Planar biaxial micropositioning stage
US4587431A (en) * 1983-04-22 1986-05-06 Jeol Ltd. Specimen manipulating mechanism for charged-particle beam instrument
FR2547524A1 (fr) * 1983-06-16 1984-12-21 Spectec Dispositif micromanipulateur pour obtenir des microdeplacements ou submicrodeplacements, utilisant l'effet peltier
FR2562987A1 (fr) * 1984-04-16 1985-10-18 Moulene Daniel Dispositif de positionnement fin d'une surface materielle

Also Published As

Publication number Publication date
CH675849A5 (US06566495-20030520-M00011.png) 1990-11-15
GB2207654A (en) 1989-02-08
GB2207654B (en) 1990-08-29
US4879467A (en) 1989-11-07
FR2608837A1 (fr) 1988-06-24
JPH01501908A (ja) 1989-06-29
WO1988004599A1 (fr) 1988-06-30
DE3790816C2 (de) 1997-02-27
JP2697757B2 (ja) 1998-01-14
GB8814669D0 (en) 1988-09-07
DE3790816T1 (US06566495-20030520-M00011.png) 1989-01-19

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Legal Events

Date Code Title Description
ST Notification of lapse