FR2596579B1 - Canon a particules electriques permettant l'emission pulsee de particules d'energie determinee - Google Patents

Canon a particules electriques permettant l'emission pulsee de particules d'energie determinee

Info

Publication number
FR2596579B1
FR2596579B1 FR8604239A FR8604239A FR2596579B1 FR 2596579 B1 FR2596579 B1 FR 2596579B1 FR 8604239 A FR8604239 A FR 8604239A FR 8604239 A FR8604239 A FR 8604239A FR 2596579 B1 FR2596579 B1 FR 2596579B1
Authority
FR
France
Prior art keywords
canon
energy particles
determined energy
pulsed emission
electric particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8604239A
Other languages
English (en)
Other versions
FR2596579A1 (fr
Inventor
Michel Troyon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Reims Champagne Ardenne URCA
Original Assignee
Universite de Reims Champagne Ardenne URCA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite de Reims Champagne Ardenne URCA filed Critical Universite de Reims Champagne Ardenne URCA
Priority to FR8604239A priority Critical patent/FR2596579B1/fr
Priority claimed from EP87402112A external-priority patent/EP0308560A1/fr
Priority to US07/100,094 priority patent/US4825080A/en
Publication of FR2596579A1 publication Critical patent/FR2596579A1/fr
Application granted granted Critical
Publication of FR2596579B1 publication Critical patent/FR2596579B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR8604239A 1986-03-25 1986-03-25 Canon a particules electriques permettant l'emission pulsee de particules d'energie determinee Expired - Fee Related FR2596579B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR8604239A FR2596579B1 (fr) 1986-03-25 1986-03-25 Canon a particules electriques permettant l'emission pulsee de particules d'energie determinee
US07/100,094 US4825080A (en) 1986-03-25 1987-09-23 Electrical particle gun

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8604239A FR2596579B1 (fr) 1986-03-25 1986-03-25 Canon a particules electriques permettant l'emission pulsee de particules d'energie determinee
EP87402112A EP0308560A1 (fr) 1987-09-22 1987-09-22 Canon à particules électriques permettant l'émission pulsée de particules d'énergie déterminée

Publications (2)

Publication Number Publication Date
FR2596579A1 FR2596579A1 (fr) 1987-10-02
FR2596579B1 true FR2596579B1 (fr) 1990-06-15

Family

ID=26111979

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8604239A Expired - Fee Related FR2596579B1 (fr) 1986-03-25 1986-03-25 Canon a particules electriques permettant l'emission pulsee de particules d'energie determinee

Country Status (1)

Country Link
FR (1) FR2596579B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0308560A1 (fr) * 1987-09-22 1989-03-29 Universite De Reims Champagne Ardenne Canon à particules électriques permettant l'émission pulsée de particules d'énergie déterminée

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204897A1 (de) * 1982-02-12 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahlerzeugendes system und verfahren zu seinem betrieb
FR2527383A1 (fr) * 1982-05-24 1983-11-25 Univ Reims Champagne Ardenne Canon a electrons avec cathode a emission de champ et lentille magnetique

Also Published As

Publication number Publication date
FR2596579A1 (fr) 1987-10-02

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Legal Events

Date Code Title Description
ST Notification of lapse