FR2592491A1 - Accelerometre triaxial electrostatique avec double liaison electrique a la masse d'epreuve - Google Patents

Accelerometre triaxial electrostatique avec double liaison electrique a la masse d'epreuve

Info

Publication number
FR2592491A1
FR2592491A1 FR8519469A FR8519469A FR2592491A1 FR 2592491 A1 FR2592491 A1 FR 2592491A1 FR 8519469 A FR8519469 A FR 8519469A FR 8519469 A FR8519469 A FR 8519469A FR 2592491 A1 FR2592491 A1 FR 2592491A1
Authority
FR
France
Prior art keywords
faces
test mass
opposite
accelerometer
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8519469A
Other languages
English (en)
Other versions
FR2592491B1 (fr
Inventor
Alain Bernard
Pierre Touboul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR8519469A priority Critical patent/FR2592491B1/fr
Priority to US07/010,441 priority patent/US4799386A/en
Priority to EP86402976A priority patent/EP0230198B1/fr
Priority to DE8686402976T priority patent/DE3669926D1/de
Publication of FR2592491A1 publication Critical patent/FR2592491A1/fr
Application granted granted Critical
Publication of FR2592491B1 publication Critical patent/FR2592491B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Abstract

L'accéléromètre comprend une masse d'épreuve à 3 paires de faces conductrices 1-6 parallèles et chacune orthogonale aux deux autres, mobile par rapport à un corps d'accéléromètre, et des électrodes solidaires du corps et formant des capacités par rapport aux faces de la masse d'épreuve. Les faces opposées de la masse d'épreuve sont isolées entre elles, les six faces 1-6 sont réunies en deux groupes 1-3 et 4-6 situés dans deux trisecteurs opposés, et les trois faces d'un groupe constituent un conducteur unique relié électriquement par un fil très souple 7 ou 8 à l'ensemble de conducteurs constituant le corps de l'accéléromètre en regard de ces trois faces. L'accéléromètre comprend ainsi une masse d'épreuve dont les faces opposées sont réunies électriquement par deux fils de liaison très souples au corps lui-même scindé en deux parties conductrices opposées et isolées entre elles. (CF DESSIN DANS BOPI)
FR8519469A 1985-12-31 1985-12-31 Accelerometre triaxial electrostatique avec double liaison electrique a la masse d'epreuve Expired FR2592491B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR8519469A FR2592491B1 (fr) 1985-12-31 1985-12-31 Accelerometre triaxial electrostatique avec double liaison electrique a la masse d'epreuve
US07/010,441 US4799386A (en) 1985-12-31 1986-12-30 Electrostatic accelerometer with dual electrical connection to its test mass
EP86402976A EP0230198B1 (fr) 1985-12-31 1986-12-31 Accéléromètre triaxial électrostatique avec connexion double à sa masse d'épreuve
DE8686402976T DE3669926D1 (de) 1985-12-31 1986-12-31 Elektrostatischer dreiachsenbeschleunigungsmesser mit elektrischem doppelanschluss an seine testmasse.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8519469A FR2592491B1 (fr) 1985-12-31 1985-12-31 Accelerometre triaxial electrostatique avec double liaison electrique a la masse d'epreuve

Publications (2)

Publication Number Publication Date
FR2592491A1 true FR2592491A1 (fr) 1987-07-03
FR2592491B1 FR2592491B1 (fr) 1988-02-12

Family

ID=9326349

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8519469A Expired FR2592491B1 (fr) 1985-12-31 1985-12-31 Accelerometre triaxial electrostatique avec double liaison electrique a la masse d'epreuve

Country Status (4)

Country Link
US (1) US4799386A (fr)
EP (1) EP0230198B1 (fr)
DE (1) DE3669926D1 (fr)
FR (1) FR2592491B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107132372A (zh) * 2017-06-29 2017-09-05 四川知微传感技术有限公司 一种用于电容式微机械加速度计电容检测的结构

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2015812A1 (fr) * 1989-05-02 1990-11-02 Shiro Nakayama Capteur d'acceleration piezoelectrique et dispositif a capteur d'acceleration piezoelectrique
US4998441A (en) * 1989-07-11 1991-03-12 Aura Systems, Inc. Force and torque measurement system
US5177331A (en) * 1991-07-05 1993-01-05 Delco Electronics Corporation Impact detector
DE19506401A1 (de) * 1995-02-23 1996-08-29 Siemens Ag Beschleunigungssensor
FR2818751B1 (fr) * 2000-12-22 2003-03-21 Giat Ind Sa Accelerometre six axes
US7552637B2 (en) * 2006-09-19 2009-06-30 Honeywell International Inc. Torque driving circuit
US8800371B2 (en) * 2012-03-08 2014-08-12 Industrial Technology Research Institute Electrostatic force generator and force measurement system and accelerometer having the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3229530A (en) * 1960-12-12 1966-01-18 North American Aviation Inc Accelerometer
DE2814794A1 (de) * 1978-04-05 1979-10-18 Singer Co Elektrostatischer beschleunigungsmesser
FR2454103A1 (fr) * 1979-04-11 1980-11-07 Sagem Perfectionnements aux accelerometres pendulaires asservis
FR2544865A1 (fr) * 1983-04-21 1984-10-26 Onera (Off Nat Aerospatiale) Accelerometres a suspension electrostatique

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2337346A1 (fr) * 1975-12-30 1977-07-29 Onera (Off Nat Aerospatiale) Pont de mesure de capacites
FR2495328B1 (fr) * 1980-11-28 1986-04-11 Onera (Off Nat Aerospatiale) Perfectionnements aux accelerometres electrostatiques
FR2511509B1 (fr) 1980-12-31 1986-01-31 Onera (Off Nat Aerospatiale) Accelerometre triaxial a suspension electrostatique d'une masse d'epreuve cruciforme
FR2541775B1 (fr) * 1983-02-28 1985-10-04 Onera (Off Nat Aerospatiale) Accelerometres a suspension electrostatique
DE3463849D1 (en) 1983-03-03 1987-06-25 Onera (Off Nat Aerospatiale) Electrostatic accelerometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3229530A (en) * 1960-12-12 1966-01-18 North American Aviation Inc Accelerometer
DE2814794A1 (de) * 1978-04-05 1979-10-18 Singer Co Elektrostatischer beschleunigungsmesser
FR2454103A1 (fr) * 1979-04-11 1980-11-07 Sagem Perfectionnements aux accelerometres pendulaires asservis
FR2544865A1 (fr) * 1983-04-21 1984-10-26 Onera (Off Nat Aerospatiale) Accelerometres a suspension electrostatique

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107132372A (zh) * 2017-06-29 2017-09-05 四川知微传感技术有限公司 一种用于电容式微机械加速度计电容检测的结构
CN107132372B (zh) * 2017-06-29 2023-03-17 四川知微传感技术有限公司 一种用于电容式微机械加速度计电容检测的结构

Also Published As

Publication number Publication date
US4799386A (en) 1989-01-24
EP0230198A3 (en) 1987-08-05
DE3669926D1 (de) 1990-05-03
EP0230198A2 (fr) 1987-07-29
EP0230198B1 (fr) 1990-03-28
FR2592491B1 (fr) 1988-02-12

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