FR2573441B1 - TARGET CATHODE FOR DEPOSITION BY SPRAYING OF A COMPOSITE MATERIAL ONTO A SUBSTRATE - Google Patents

TARGET CATHODE FOR DEPOSITION BY SPRAYING OF A COMPOSITE MATERIAL ONTO A SUBSTRATE

Info

Publication number
FR2573441B1
FR2573441B1 FR8417599A FR8417599A FR2573441B1 FR 2573441 B1 FR2573441 B1 FR 2573441B1 FR 8417599 A FR8417599 A FR 8417599A FR 8417599 A FR8417599 A FR 8417599A FR 2573441 B1 FR2573441 B1 FR 2573441B1
Authority
FR
France
Prior art keywords
spraying
deposition
substrate
composite material
material onto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8417599A
Other languages
French (fr)
Other versions
FR2573441A1 (en
Inventor
Yves Crassin
Guy Gorinas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to FR8417599A priority Critical patent/FR2573441B1/en
Publication of FR2573441A1 publication Critical patent/FR2573441A1/en
Application granted granted Critical
Publication of FR2573441B1 publication Critical patent/FR2573441B1/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR8417599A 1984-11-19 1984-11-19 TARGET CATHODE FOR DEPOSITION BY SPRAYING OF A COMPOSITE MATERIAL ONTO A SUBSTRATE Expired FR2573441B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8417599A FR2573441B1 (en) 1984-11-19 1984-11-19 TARGET CATHODE FOR DEPOSITION BY SPRAYING OF A COMPOSITE MATERIAL ONTO A SUBSTRATE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8417599A FR2573441B1 (en) 1984-11-19 1984-11-19 TARGET CATHODE FOR DEPOSITION BY SPRAYING OF A COMPOSITE MATERIAL ONTO A SUBSTRATE

Publications (2)

Publication Number Publication Date
FR2573441A1 FR2573441A1 (en) 1986-05-23
FR2573441B1 true FR2573441B1 (en) 1987-08-07

Family

ID=9309718

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8417599A Expired FR2573441B1 (en) 1984-11-19 1984-11-19 TARGET CATHODE FOR DEPOSITION BY SPRAYING OF A COMPOSITE MATERIAL ONTO A SUBSTRATE

Country Status (1)

Country Link
FR (1) FR2573441B1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3613018A1 (en) * 1986-04-17 1987-10-22 Santos Pereira Ribeiro Car Dos MAGNETRON SPRAYING CATHODE
DE8703520U1 (en) * 1987-02-03 1987-10-01 Balzers Hochvakuum GmbH, 65205 Wiesbaden Cathode surrounded by a limiting ring with an electrically conductive surface for an arc discharge
DE19508405A1 (en) * 1995-03-09 1996-09-12 Leybold Ag Cathode arrangement for a device for atomizing a target pair
EP0837491A3 (en) 1996-10-21 2000-11-15 Nihon Shinku Gijutsu Kabushiki Kaisha Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly
GB9622913D0 (en) * 1996-11-04 1997-01-08 Boc Group Plc Sputtering processes and apparatus
US6093293A (en) * 1997-12-17 2000-07-25 Balzers Hochvakuum Ag Magnetron sputtering source
EP1903123B1 (en) * 2004-11-19 2012-02-22 Applied Materials GmbH & Co. KG Mounting plate with a cooled backing plate set on top

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1574686A (en) * 1968-01-11 1969-07-18

Also Published As

Publication number Publication date
FR2573441A1 (en) 1986-05-23

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Legal Events

Date Code Title Description
ST Notification of lapse