FR2571746B1 - Dispositif de maintien d'un porte-substrat en transfert pour la fabrication de semi-conducteurs par epitaxie sous vide - Google Patents

Dispositif de maintien d'un porte-substrat en transfert pour la fabrication de semi-conducteurs par epitaxie sous vide

Info

Publication number
FR2571746B1
FR2571746B1 FR8415609A FR8415609A FR2571746B1 FR 2571746 B1 FR2571746 B1 FR 2571746B1 FR 8415609 A FR8415609 A FR 8415609A FR 8415609 A FR8415609 A FR 8415609A FR 2571746 B1 FR2571746 B1 FR 2571746B1
Authority
FR
France
Prior art keywords
semiconductors
manufacture
holding
transfer
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8415609A
Other languages
English (en)
Other versions
FR2571746A1 (fr
Inventor
Dominique Bonnevie
Bruno Chevet
Daniel Dufresne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Compagnie Generale dElectricite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Generale dElectricite SA filed Critical Compagnie Generale dElectricite SA
Priority to FR8415609A priority Critical patent/FR2571746B1/fr
Publication of FR2571746A1 publication Critical patent/FR2571746A1/fr
Application granted granted Critical
Publication of FR2571746B1 publication Critical patent/FR2571746B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
FR8415609A 1984-10-11 1984-10-11 Dispositif de maintien d'un porte-substrat en transfert pour la fabrication de semi-conducteurs par epitaxie sous vide Expired FR2571746B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8415609A FR2571746B1 (fr) 1984-10-11 1984-10-11 Dispositif de maintien d'un porte-substrat en transfert pour la fabrication de semi-conducteurs par epitaxie sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8415609A FR2571746B1 (fr) 1984-10-11 1984-10-11 Dispositif de maintien d'un porte-substrat en transfert pour la fabrication de semi-conducteurs par epitaxie sous vide

Publications (2)

Publication Number Publication Date
FR2571746A1 FR2571746A1 (fr) 1986-04-18
FR2571746B1 true FR2571746B1 (fr) 1986-12-05

Family

ID=9308565

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8415609A Expired FR2571746B1 (fr) 1984-10-11 1984-10-11 Dispositif de maintien d'un porte-substrat en transfert pour la fabrication de semi-conducteurs par epitaxie sous vide

Country Status (1)

Country Link
FR (1) FR2571746B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2633452B1 (fr) * 1988-06-28 1990-11-02 Doue Julien Dispositif de support pour un substrat mince, notamment en un materiau semiconducteur

Also Published As

Publication number Publication date
FR2571746A1 (fr) 1986-04-18

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Legal Events

Date Code Title Description
ST Notification of lapse