FR2566930B1 - Dispositif xy pour photorepeteur - Google Patents

Dispositif xy pour photorepeteur

Info

Publication number
FR2566930B1
FR2566930B1 FR8410403A FR8410403A FR2566930B1 FR 2566930 B1 FR2566930 B1 FR 2566930B1 FR 8410403 A FR8410403 A FR 8410403A FR 8410403 A FR8410403 A FR 8410403A FR 2566930 B1 FR2566930 B1 FR 2566930B1
Authority
FR
France
Prior art keywords
photorepector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8410403A
Other languages
English (en)
Other versions
FR2566930A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZAITSEV VALENTIN
Original Assignee
ZAITSEV VALENTIN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZAITSEV VALENTIN filed Critical ZAITSEV VALENTIN
Priority to FR8410403A priority Critical patent/FR2566930B1/fr
Publication of FR2566930A1 publication Critical patent/FR2566930A1/fr
Application granted granted Critical
Publication of FR2566930B1 publication Critical patent/FR2566930B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
FR8410403A 1984-06-29 1984-06-29 Dispositif xy pour photorepeteur Expired FR2566930B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8410403A FR2566930B1 (fr) 1984-06-29 1984-06-29 Dispositif xy pour photorepeteur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8410403A FR2566930B1 (fr) 1984-06-29 1984-06-29 Dispositif xy pour photorepeteur

Publications (2)

Publication Number Publication Date
FR2566930A1 FR2566930A1 (fr) 1986-01-03
FR2566930B1 true FR2566930B1 (fr) 1987-01-02

Family

ID=9305655

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8410403A Expired FR2566930B1 (fr) 1984-06-29 1984-06-29 Dispositif xy pour photorepeteur

Country Status (1)

Country Link
FR (1) FR2566930B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4742286A (en) * 1985-10-29 1988-05-03 Micro-Stage, Inc. Gas bearing X-Y-θ stage assembly

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146717B2 (fr) * 1972-06-21 1976-12-10
FR2388371A1 (fr) * 1977-04-20 1978-11-17 Thomson Csf Procede d'alignement, dans un photorepeteur, d'une plaquette semi-conductrice et des motifs a y projeter et photorepeteur mettant en oeuvre un tel procede
US4200395A (en) * 1977-05-03 1980-04-29 Massachusetts Institute Of Technology Alignment of diffraction gratings
US4265542A (en) * 1977-11-04 1981-05-05 Computervision Corporation Apparatus and method for fine alignment of a photomask to a semiconductor wafer
FR2450468A1 (fr) * 1979-02-27 1980-09-26 Thomson Csf Systeme optique d'alignement de deux motifs et photorepeteur mettant en oeuvre un tel systeme

Also Published As

Publication number Publication date
FR2566930A1 (fr) 1986-01-03

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Legal Events

Date Code Title Description
ST Notification of lapse