FR2551614B1 - Source intense de rayons x mous, a compression cylindrique de plasma, ce plasma etant obtenu a partir d'une feuille explosee - Google Patents
Source intense de rayons x mous, a compression cylindrique de plasma, ce plasma etant obtenu a partir d'une feuille exploseeInfo
- Publication number
- FR2551614B1 FR2551614B1 FR8314085A FR8314085A FR2551614B1 FR 2551614 B1 FR2551614 B1 FR 2551614B1 FR 8314085 A FR8314085 A FR 8314085A FR 8314085 A FR8314085 A FR 8314085A FR 2551614 B1 FR2551614 B1 FR 2551614B1
- Authority
- FR
- France
- Prior art keywords
- plasma
- explosed
- sheet
- ray source
- cylindrical compression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000006835 compression Effects 0.000 title 1
- 238000007906 compression Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/52—Generating plasma using exploding wires or spark gaps
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- X-Ray Techniques (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8314085A FR2551614B1 (fr) | 1983-09-02 | 1983-09-02 | Source intense de rayons x mous, a compression cylindrique de plasma, ce plasma etant obtenu a partir d'une feuille explosee |
US06/643,457 US4602376A (en) | 1983-09-02 | 1984-08-23 | Soft X-ray source with cylindrical plasma compression |
EP84401732A EP0143011A1 (fr) | 1983-09-02 | 1984-08-29 | Source intense de rayons x mous, à compression cylindrique de plasma, ce plasma étant obtenu à partir d'une feuille explosée |
JP59182547A JPS6074335A (ja) | 1983-09-02 | 1984-08-31 | 円筒形プラズマ圧縮を用いた軟x線源 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8314085A FR2551614B1 (fr) | 1983-09-02 | 1983-09-02 | Source intense de rayons x mous, a compression cylindrique de plasma, ce plasma etant obtenu a partir d'une feuille explosee |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2551614A1 FR2551614A1 (fr) | 1985-03-08 |
FR2551614B1 true FR2551614B1 (fr) | 1986-03-21 |
Family
ID=9291960
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8314085A Expired FR2551614B1 (fr) | 1983-09-02 | 1983-09-02 | Source intense de rayons x mous, a compression cylindrique de plasma, ce plasma etant obtenu a partir d'une feuille explosee |
Country Status (4)
Country | Link |
---|---|
US (1) | US4602376A (fr) |
EP (1) | EP0143011A1 (fr) |
JP (1) | JPS6074335A (fr) |
FR (1) | FR2551614B1 (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4644576A (en) * | 1985-04-26 | 1987-02-17 | At&T Technologies, Inc. | Method and apparatus for producing x-ray pulses |
CA1239486A (fr) * | 1985-10-03 | 1988-07-19 | Rajendra P. Gupta | Source de rayons x a plasma annulaire comprime engendre par une decharge dans un gaz |
CA1239487A (fr) * | 1985-10-03 | 1988-07-19 | National Research Council Of Canada | Source de rayons x a plasma comprime engendre par des decharges multiples dans le vide |
US4757524A (en) * | 1986-03-19 | 1988-07-12 | Northrop Corporation | X-ray generator |
US4837793A (en) * | 1987-08-25 | 1989-06-06 | Hampshire Instruments, Inc. | Mass limited target |
JP2657850B2 (ja) * | 1990-10-23 | 1997-09-30 | 株式会社半導体エネルギー研究所 | プラズマ発生装置およびそれを用いたエッチング方法 |
US6195272B1 (en) | 2000-03-16 | 2001-02-27 | Joseph E. Pascente | Pulsed high voltage power supply radiography system having a one to one correspondence between low voltage input pulses and high voltage output pulses |
US6765987B2 (en) | 2001-03-15 | 2004-07-20 | Safe Food Technologies, Inc. | Resonant plasma x-ray source |
DE10139677A1 (de) * | 2001-04-06 | 2002-10-17 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zum Erzeugen von extrem ultravioletter Strahlung und weicher Röntgenstrahlung |
FR2839810B1 (fr) * | 2002-05-17 | 2004-11-12 | Tda Armements Sas | Commutateur a ouverture de type a fils exploses et procede de fabrication |
JP5656014B2 (ja) * | 2010-04-06 | 2015-01-21 | 株式会社Ihi | プラズマ光源とプラズマ光発生方法 |
CN115267400B (zh) * | 2022-08-17 | 2024-09-13 | 西安交通大学 | 用于产生等离子体射流及软x射线点源的实验装置及方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3746860A (en) * | 1972-02-17 | 1973-07-17 | J Stettler | Soft x-ray generator assisted by laser |
US3835330A (en) * | 1972-09-15 | 1974-09-10 | Us Air Force | Electromagnetic implosion x-ray source |
-
1983
- 1983-09-02 FR FR8314085A patent/FR2551614B1/fr not_active Expired
-
1984
- 1984-08-23 US US06/643,457 patent/US4602376A/en not_active Expired - Fee Related
- 1984-08-29 EP EP84401732A patent/EP0143011A1/fr not_active Withdrawn
- 1984-08-31 JP JP59182547A patent/JPS6074335A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0143011A1 (fr) | 1985-05-29 |
FR2551614A1 (fr) | 1985-03-08 |
JPS6074335A (ja) | 1985-04-26 |
US4602376A (en) | 1986-07-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |