FR2530354B1 - DEVICE FOR IMPRESSING A TRACE ON THE FLIGHT ON A PHOTOSENSITIVE LAYER - Google Patents

DEVICE FOR IMPRESSING A TRACE ON THE FLIGHT ON A PHOTOSENSITIVE LAYER

Info

Publication number
FR2530354B1
FR2530354B1 FR8212377A FR8212377A FR2530354B1 FR 2530354 B1 FR2530354 B1 FR 2530354B1 FR 8212377 A FR8212377 A FR 8212377A FR 8212377 A FR8212377 A FR 8212377A FR 2530354 B1 FR2530354 B1 FR 2530354B1
Authority
FR
France
Prior art keywords
impressing
flight
trace
photosensitive layer
photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8212377A
Other languages
French (fr)
Other versions
FR2530354A1 (en
Inventor
Olivier Hignette
Paul Tigreat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EUROMASK
Original Assignee
EUROMASK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EUROMASK filed Critical EUROMASK
Priority to FR8212377A priority Critical patent/FR2530354B1/en
Publication of FR2530354A1 publication Critical patent/FR2530354A1/en
Application granted granted Critical
Publication of FR2530354B1 publication Critical patent/FR2530354B1/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR8212377A 1982-07-15 1982-07-15 DEVICE FOR IMPRESSING A TRACE ON THE FLIGHT ON A PHOTOSENSITIVE LAYER Expired FR2530354B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8212377A FR2530354B1 (en) 1982-07-15 1982-07-15 DEVICE FOR IMPRESSING A TRACE ON THE FLIGHT ON A PHOTOSENSITIVE LAYER

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8212377A FR2530354B1 (en) 1982-07-15 1982-07-15 DEVICE FOR IMPRESSING A TRACE ON THE FLIGHT ON A PHOTOSENSITIVE LAYER

Publications (2)

Publication Number Publication Date
FR2530354A1 FR2530354A1 (en) 1984-01-20
FR2530354B1 true FR2530354B1 (en) 1986-09-26

Family

ID=9275991

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8212377A Expired FR2530354B1 (en) 1982-07-15 1982-07-15 DEVICE FOR IMPRESSING A TRACE ON THE FLIGHT ON A PHOTOSENSITIVE LAYER

Country Status (1)

Country Link
FR (1) FR2530354B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0311624A1 (en) * 1986-06-24 1989-04-19 Lothian Microfabrication Limited Improved registration method in photolithography and equipment for carrying out this method
SE516347C2 (en) 1999-11-17 2001-12-17 Micronic Laser Systems Ab Laser scanning system and method for microlithographic writing

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2127373A5 (en) * 1971-03-05 1972-10-13 Thomson Csf
US3900851A (en) * 1974-01-07 1975-08-19 Abex Corp Multi-channel wideband oscillograph
US4248959A (en) * 1978-12-07 1981-02-03 American Hoechst Corporation Preparation of diazo printing plates using laser exposure

Also Published As

Publication number Publication date
FR2530354A1 (en) 1984-01-20

Similar Documents

Publication Publication Date Title
FR2520158B1 (en) MULTI-LAYER INTEGRATED ELECTRO-OPTICAL DEVICE
FR2518050B1 (en) DEVICE FOR REALIZING THE SIDE SEALING OF A SHUTTER SLOT ON AN AIRCRAFT
FR2562815B1 (en) DEVICE FOR APPLYING COATING ON MOVING STRIPS
BE896874A (en) DEVICE FOR TAKING SUPPORT ON WHEELS.
FR2501221B1 (en) THERMOSETTING CONDUCTIVE INK AND METHOD FOR FORMING A CONDUCTIVE COATING ON A SUBSTRATE USING THE SAME
FR2340207A1 (en) DEVICE AND METHOD FOR PRINTING INFORMATION ON A SURFACE
FR2543624B1 (en) DEVICE FOR ESTABLISHING A BLOCKING ASSEMBLY
FR2420845B1 (en) CONSTRAINT ADAPTER FOR SEMICONDUCTOR DEVICE
FR2489593B1 (en) SEMICONDUCTOR RECTIFIER DEVICE
BE874343A (en) CONNECTOR ASSEMBLY FOR CONDUCTORLESS MICROCIRCUIT DEVICE
RO83564A (en) DEVICE FOR APPLYING A BRASSURE ON CONDUCTIVE PLATES
FR2299212A1 (en) SKI DEVICE FOR MOUNTING ON A TANDEM WHEEL LANDING GEAR
BE861445A (en) AIRCRAFT LANDING DEVICE
FR2534078B1 (en) SEMICONDUCTOR LASER DEVICE
FR2502515B1 (en) VIBRATION DEVICE, PARTICULARLY FOR A SCREEN
FR2534079B1 (en) SEMICONDUCTOR LASER DEVICE
FR2555903B1 (en) AUXILIARY DEVICE FOR INTERMITTENT CATHETERISM
FR2530354B1 (en) DEVICE FOR IMPRESSING A TRACE ON THE FLIGHT ON A PHOTOSENSITIVE LAYER
FR2525355B1 (en) ELECTRO-OPTICAL DEVICE
PT74908A (en) DEVICE FOR APPLYING REVEYING TO AN IMMERED SURFACE
FR2551020B1 (en) DEVICE FOR SELF-EXTENDABLE BUOY
BE888959A (en) DEVICE FOR FORMING A BIT OF CHIPS ON A SUPPORT
PT65893A (en) DEVICE FOR APPLYING A COATING TO AN IMMERED SURFACE
BE894812A (en) LAYER WITH ADDITIONAL FOLD FASTENING DEVICE
FR2549594B1 (en) DEVICE FOR FAST CAMOUFLAGE

Legal Events

Date Code Title Description
ST Notification of lapse