FR2517283B1 - Appareil de support pneumatique pour le transport d'objets - Google Patents

Appareil de support pneumatique pour le transport d'objets

Info

Publication number
FR2517283B1
FR2517283B1 FR8220080A FR8220080A FR2517283B1 FR 2517283 B1 FR2517283 B1 FR 2517283B1 FR 8220080 A FR8220080 A FR 8220080A FR 8220080 A FR8220080 A FR 8220080A FR 2517283 B1 FR2517283 B1 FR 2517283B1
Authority
FR
France
Prior art keywords
support apparatus
transporting objects
pneumatic support
pneumatic
transporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8220080A
Other languages
English (en)
Other versions
FR2517283A1 (fr
Inventor
Charles Curtis Baker
Perry Schelker Banks
Patrick Frank Raduazzo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GCA Corp
Original Assignee
GCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GCA Corp filed Critical GCA Corp
Publication of FR2517283A1 publication Critical patent/FR2517283A1/fr
Application granted granted Critical
Publication of FR2517283B1 publication Critical patent/FR2517283B1/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
FR8220080A 1981-12-01 1982-11-30 Appareil de support pneumatique pour le transport d'objets Expired FR2517283B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/326,399 US4444531A (en) 1981-12-01 1981-12-01 Air track apparatus

Publications (2)

Publication Number Publication Date
FR2517283A1 FR2517283A1 (fr) 1983-06-03
FR2517283B1 true FR2517283B1 (fr) 1987-01-23

Family

ID=23272027

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8220080A Expired FR2517283B1 (fr) 1981-12-01 1982-11-30 Appareil de support pneumatique pour le transport d'objets

Country Status (5)

Country Link
US (1) US4444531A (fr)
JP (1) JPS58148116A (fr)
DE (1) DE3242944A1 (fr)
FR (1) FR2517283B1 (fr)
GB (1) GB2112340B (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4722276A (en) * 1986-08-01 1988-02-02 Tyler Jack D Air blast for preventing contact of wet ink sheets with printing press delivery mechanisms
US4732513A (en) * 1986-08-29 1988-03-22 Precision Metal Fabricators, Inc. Controlled speed coverless air conveyor
NL8703024A (nl) * 1986-12-18 1988-07-18 De Beers Ind Diamond Werkwijze voor het bepalen van een stralingsdosis alsmede inrichting voor het uitvoeren van de werkwijze.
US4877485A (en) * 1987-06-01 1989-10-31 Process Automation Business, Inc. Sheet inspection station with pneumatic sheet guide
FR2689077A1 (fr) * 1992-03-31 1993-10-01 Magar Hubert Moyen de déplacement en sustentation par multijets.
US5788425A (en) * 1992-07-15 1998-08-04 Imation Corp. Flexible system for handling articles
US5602619A (en) * 1993-09-22 1997-02-11 Nikon Precision, Inc. Scanner for step and scan lithography system
US5584441A (en) * 1995-04-24 1996-12-17 Eastman Kodak Company Apparatus and method for spooling strips of web into a cartridge
US5584442A (en) * 1995-04-24 1996-12-17 Eastman Kodak Company Apparatus and method for preparing strips of web and winding them into a cartridge
AU1224600A (en) * 1998-10-30 2000-05-22 Hi-Speed Checkweigher Co. Inc. High speed pneumatic weighing device
DE19857142C2 (de) * 1998-12-11 2000-12-21 Fraunhofer Ges Forschung Vorrichtung zum kontaminationsfreien, kontinuierlichen oder getakteten Transport von scheibenförmigen Gegenständen, insbesondere Substraten oder Wafern, durch eine geschlossene Behandlungsstrecke
US6676365B2 (en) 2001-03-16 2004-01-13 Toda Kogyo Corporation Air track conveyor system for disk production
EP2481832A1 (fr) * 2011-01-31 2012-08-01 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Appareil pour le dépôt de couches atomiques

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2805898A (en) * 1955-01-18 1957-09-10 Jr Edward A Willis Fluid current conveyor for fragile articles
GB1161596A (en) * 1965-10-22 1969-08-13 Pilkington Brothers Ltd Improvements in or relating to Methods of and Apparatus for Conveying Glass Sheets
US3350140A (en) * 1966-05-11 1967-10-31 Mauritz L Strydom Conveying slab-shaped articles
FR2274527A1 (fr) * 1974-06-11 1976-01-09 Bertin & Cie Dispositif transporteur de lettres, plis postaux ou autres objets minces

Also Published As

Publication number Publication date
GB2112340B (en) 1985-07-17
GB2112340A (en) 1983-07-20
JPS58148116A (ja) 1983-09-03
US4444531A (en) 1984-04-24
FR2517283A1 (fr) 1983-06-03
DE3242944A1 (de) 1983-07-14

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Legal Events

Date Code Title Description
ST Notification of lapse