FR2513661B1 - Installation pour le depot de couches sous vide a travers des masques, munie d'un dispositif permettant de changer de masque - Google Patents

Installation pour le depot de couches sous vide a travers des masques, munie d'un dispositif permettant de changer de masque

Info

Publication number
FR2513661B1
FR2513661B1 FR8118415A FR8118415A FR2513661B1 FR 2513661 B1 FR2513661 B1 FR 2513661B1 FR 8118415 A FR8118415 A FR 8118415A FR 8118415 A FR8118415 A FR 8118415A FR 2513661 B1 FR2513661 B1 FR 2513661B1
Authority
FR
France
Prior art keywords
masks
deposition
installation
changing
vacuum layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8118415A
Other languages
English (en)
Other versions
FR2513661A1 (fr
Inventor
Roger Tueta
Joseph Wattre
Michel Braguier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR8118415A priority Critical patent/FR2513661B1/fr
Publication of FR2513661A1 publication Critical patent/FR2513661A1/fr
Application granted granted Critical
Publication of FR2513661B1 publication Critical patent/FR2513661B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
FR8118415A 1981-09-30 1981-09-30 Installation pour le depot de couches sous vide a travers des masques, munie d'un dispositif permettant de changer de masque Expired FR2513661B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8118415A FR2513661B1 (fr) 1981-09-30 1981-09-30 Installation pour le depot de couches sous vide a travers des masques, munie d'un dispositif permettant de changer de masque

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8118415A FR2513661B1 (fr) 1981-09-30 1981-09-30 Installation pour le depot de couches sous vide a travers des masques, munie d'un dispositif permettant de changer de masque

Publications (2)

Publication Number Publication Date
FR2513661A1 FR2513661A1 (fr) 1983-04-01
FR2513661B1 true FR2513661B1 (fr) 1985-12-06

Family

ID=9262614

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8118415A Expired FR2513661B1 (fr) 1981-09-30 1981-09-30 Installation pour le depot de couches sous vide a travers des masques, munie d'un dispositif permettant de changer de masque

Country Status (1)

Country Link
FR (1) FR2513661B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3925536A1 (de) * 1989-08-02 1991-02-07 Leybold Ag Anordnung zur dickenmessung von duennschichten
DE102004034418B4 (de) * 2004-07-15 2009-06-25 Schott Ag Verfahren zur Herstellung struktuierter optischer Filterschichten auf Substraten
EP2243855B1 (fr) * 2009-04-22 2021-03-03 Solmates B.V. Dépôt laser à impulsion avec des masques perforés échangeables

Also Published As

Publication number Publication date
FR2513661A1 (fr) 1983-04-01

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Legal Events

Date Code Title Description
ST Notification of lapse