FR2508734B1 - SAFETY ELECTRICAL SUPPLY FOR LUMINESCENT DISCHARGE - Google Patents

SAFETY ELECTRICAL SUPPLY FOR LUMINESCENT DISCHARGE

Info

Publication number
FR2508734B1
FR2508734B1 FR8112912A FR8112912A FR2508734B1 FR 2508734 B1 FR2508734 B1 FR 2508734B1 FR 8112912 A FR8112912 A FR 8112912A FR 8112912 A FR8112912 A FR 8112912A FR 2508734 B1 FR2508734 B1 FR 2508734B1
Authority
FR
France
Prior art keywords
electrical supply
safety electrical
luminescent discharge
luminescent
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8112912A
Other languages
French (fr)
Other versions
FR2508734A1 (en
Inventor
J-P Terrat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Stephanois de Recherches Mecaniques Hydromecanique et Frottement SA
Original Assignee
Centre Stephanois de Recherches Mecaniques Hydromecanique et Frottement SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Stephanois de Recherches Mecaniques Hydromecanique et Frottement SA filed Critical Centre Stephanois de Recherches Mecaniques Hydromecanique et Frottement SA
Priority to FR8112912A priority Critical patent/FR2508734B1/en
Publication of FR2508734A1 publication Critical patent/FR2508734A1/en
Application granted granted Critical
Publication of FR2508734B1 publication Critical patent/FR2508734B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H9/00—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection
    • H02H9/008—Intrinsically safe circuits

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Emergency Protection Circuit Devices (AREA)
FR8112912A 1981-06-24 1981-06-24 SAFETY ELECTRICAL SUPPLY FOR LUMINESCENT DISCHARGE Expired FR2508734B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8112912A FR2508734B1 (en) 1981-06-24 1981-06-24 SAFETY ELECTRICAL SUPPLY FOR LUMINESCENT DISCHARGE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8112912A FR2508734B1 (en) 1981-06-24 1981-06-24 SAFETY ELECTRICAL SUPPLY FOR LUMINESCENT DISCHARGE

Publications (2)

Publication Number Publication Date
FR2508734A1 FR2508734A1 (en) 1982-12-31
FR2508734B1 true FR2508734B1 (en) 1986-05-09

Family

ID=9260059

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8112912A Expired FR2508734B1 (en) 1981-06-24 1981-06-24 SAFETY ELECTRICAL SUPPLY FOR LUMINESCENT DISCHARGE

Country Status (1)

Country Link
FR (1) FR2508734B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1266098A (en) * 1959-08-17 1961-07-07 Berghaus Elektrophysik Anst Method and device for ensuring the stability of high-energy glow discharges in gas atmosphere
FR1466995A (en) * 1965-02-04 1967-01-20 Continental Can Co Apparatus and method for condensing monomer vapors for polymerization in an electric discharge
FR1541370A (en) * 1966-11-08 1968-10-04 Berghaus Elektrophysik Anst Method and device for controlling the electrical behavior of a high intensity glow discharge, for metallurgical operations
DE2941339A1 (en) * 1979-10-12 1981-04-23 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Current limiter for switch=on current of magnetron in microwave oven - has relay to connect in resistor in series with transformer

Also Published As

Publication number Publication date
FR2508734A1 (en) 1982-12-31

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Legal Events

Date Code Title Description
ST Notification of lapse