FR2501861B1 - - Google Patents

Info

Publication number
FR2501861B1
FR2501861B1 FR8104867A FR8104867A FR2501861B1 FR 2501861 B1 FR2501861 B1 FR 2501861B1 FR 8104867 A FR8104867 A FR 8104867A FR 8104867 A FR8104867 A FR 8104867A FR 2501861 B1 FR2501861 B1 FR 2501861B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8104867A
Other languages
French (fr)
Other versions
FR2501861A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR8104867A priority Critical patent/FR2501861A1/fr
Publication of FR2501861A1 publication Critical patent/FR2501861A1/fr
Application granted granted Critical
Publication of FR2501861B1 publication Critical patent/FR2501861B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR8104867A 1981-03-11 1981-03-11 Ellipsometre comportant un prisme a reflexions totales Granted FR2501861A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8104867A FR2501861A1 (fr) 1981-03-11 1981-03-11 Ellipsometre comportant un prisme a reflexions totales

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8104867A FR2501861A1 (fr) 1981-03-11 1981-03-11 Ellipsometre comportant un prisme a reflexions totales

Publications (2)

Publication Number Publication Date
FR2501861A1 FR2501861A1 (fr) 1982-09-17
FR2501861B1 true FR2501861B1 (xx) 1984-03-16

Family

ID=9256111

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8104867A Granted FR2501861A1 (fr) 1981-03-11 1981-03-11 Ellipsometre comportant un prisme a reflexions totales

Country Status (1)

Country Link
FR (1) FR2501861A1 (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000065727A (ja) * 1998-08-20 2000-03-03 Olympus Optical Co Ltd 偏光解析装置
US6621578B1 (en) * 1999-11-26 2003-09-16 Olympus Optical Co, Ltd. Elliposometer, sample positioning mechanism, and polarization angular adjusting mechanism, used in the elliposometer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3563633A (en) * 1968-06-27 1971-02-16 Eastman Kodak Co Phase-compensated trihedral reflectors for interferometer systems

Also Published As

Publication number Publication date
FR2501861A1 (fr) 1982-09-17

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Legal Events

Date Code Title Description
ST Notification of lapse