FR2490815A1 - Capteur de mesure de pressions - Google Patents
Capteur de mesure de pressions Download PDFInfo
- Publication number
- FR2490815A1 FR2490815A1 FR8020463A FR8020463A FR2490815A1 FR 2490815 A1 FR2490815 A1 FR 2490815A1 FR 8020463 A FR8020463 A FR 8020463A FR 8020463 A FR8020463 A FR 8020463A FR 2490815 A1 FR2490815 A1 FR 2490815A1
- Authority
- FR
- France
- Prior art keywords
- membrane
- supports
- sensor according
- bases
- spacers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 41
- 239000012530 fluid Substances 0.000 claims abstract description 12
- 125000006850 spacer group Chemical group 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 13
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims 1
- 239000003990 capacitor Substances 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 4
- 229910052790 beryllium Inorganic materials 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000737 Duralumin Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000012858 resilient material Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8020463A FR2490815A1 (fr) | 1980-09-24 | 1980-09-24 | Capteur de mesure de pressions |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8020463A FR2490815A1 (fr) | 1980-09-24 | 1980-09-24 | Capteur de mesure de pressions |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2490815A1 true FR2490815A1 (fr) | 1982-03-26 |
| FR2490815B1 FR2490815B1 (enExample) | 1983-03-11 |
Family
ID=9246234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8020463A Granted FR2490815A1 (fr) | 1980-09-24 | 1980-09-24 | Capteur de mesure de pressions |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2490815A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2775075A1 (fr) * | 1998-02-18 | 1999-08-20 | Theobald Sa A | Capteur de pression differentielle |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3134374B1 (de) * | 2014-04-23 | 2019-05-22 | Endress+Hauser SE+Co. KG | Drucksensor mit einem keramischen grundkörper |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2066531A5 (enExample) * | 1969-10-27 | 1971-08-06 | Rosemount Eng Co Ltd |
-
1980
- 1980-09-24 FR FR8020463A patent/FR2490815A1/fr active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2066531A5 (enExample) * | 1969-10-27 | 1971-08-06 | Rosemount Eng Co Ltd |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2775075A1 (fr) * | 1998-02-18 | 1999-08-20 | Theobald Sa A | Capteur de pression differentielle |
| WO1999042802A1 (fr) * | 1998-02-18 | 1999-08-26 | A. Theobald S.A. | Capteur de pression differentielle |
| US6418793B1 (en) | 1998-02-18 | 2002-07-16 | A Theobald Sa | Differential pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2490815B1 (enExample) | 1983-03-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| TP | Transmission of property | ||
| ST | Notification of lapse |