FR2481012B1 - - Google Patents

Info

Publication number
FR2481012B1
FR2481012B1 FR8008830A FR8008830A FR2481012B1 FR 2481012 B1 FR2481012 B1 FR 2481012B1 FR 8008830 A FR8008830 A FR 8008830A FR 8008830 A FR8008830 A FR 8008830A FR 2481012 B1 FR2481012 B1 FR 2481012B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8008830A
Other languages
French (fr)
Other versions
FR2481012A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vmei Lenin
Original Assignee
Vmei Lenin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vmei Lenin filed Critical Vmei Lenin
Publication of FR2481012A1 publication Critical patent/FR2481012A1/fr
Application granted granted Critical
Publication of FR2481012B1 publication Critical patent/FR2481012B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
    • H01B17/46—Means for providing an external arc-discharge path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lasers (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Emergency Protection Circuit Devices (AREA)
  • Insulators (AREA)
FR8008830A 1980-04-15 1980-04-18 Module de protection des isolateurs electriques contre les decharges luminescentes Granted FR2481012A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8012334A GB2073999B (en) 1980-04-15 1980-04-15 Device for use in a glow discharge apparatus

Publications (2)

Publication Number Publication Date
FR2481012A1 FR2481012A1 (fr) 1981-10-23
FR2481012B1 true FR2481012B1 (sv) 1985-03-15

Family

ID=10512791

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8008830A Granted FR2481012A1 (fr) 1980-04-15 1980-04-18 Module de protection des isolateurs electriques contre les decharges luminescentes

Country Status (5)

Country Link
AT (1) AT369927B (sv)
CH (1) CH657224A5 (sv)
FR (1) FR2481012A1 (sv)
GB (1) GB2073999B (sv)
SE (1) SE450179B (sv)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0908921A1 (en) * 1997-10-10 1999-04-14 European Community Process chamber for plasma enhanced chemical vapour deposition and apparatus employing said process chamber

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR825025A (fr) * 1936-11-07 1938-02-22 Dunlop Sa Perfectionnements aux roues de tracteurs ou autre véhicule en vue d'augmenter leur adhérence
US2906911A (en) * 1953-05-28 1959-09-29 Berghaus Elektrophysik Anst Leading-in insulators for electric glow discharge receptacles
NL199311A (sv) * 1954-08-05
FR1268489A (fr) * 1959-05-08 1961-08-04 Berghaus Elektrophysik Anst Organe porteur isolant

Also Published As

Publication number Publication date
FR2481012A1 (fr) 1981-10-23
GB2073999B (en) 1983-09-07
ATA194380A (de) 1982-06-15
AT369927B (de) 1983-02-10
SE450179B (sv) 1987-06-09
CH657224A5 (en) 1986-08-15
GB2073999A (en) 1981-10-21
SE8002774L (sv) 1981-10-15

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Legal Events

Date Code Title Description
ST Notification of lapse