FR2477769B1 - - Google Patents
Info
- Publication number
- FR2477769B1 FR2477769B1 FR8005037A FR8005037A FR2477769B1 FR 2477769 B1 FR2477769 B1 FR 2477769B1 FR 8005037 A FR8005037 A FR 8005037A FR 8005037 A FR8005037 A FR 8005037A FR 2477769 B1 FR2477769 B1 FR 2477769B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8005037A FR2477769A1 (fr) | 1980-03-06 | 1980-03-06 | Dispositif pour microscope electronique permettant un traitement in situ d'echantillons |
JP2893581U JPS579159U (ja) | 1980-03-06 | 1981-03-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8005037A FR2477769A1 (fr) | 1980-03-06 | 1980-03-06 | Dispositif pour microscope electronique permettant un traitement in situ d'echantillons |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2477769A1 FR2477769A1 (fr) | 1981-09-11 |
FR2477769B1 true FR2477769B1 (ja) | 1982-09-24 |
Family
ID=9239385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8005037A Granted FR2477769A1 (fr) | 1980-03-06 | 1980-03-06 | Dispositif pour microscope electronique permettant un traitement in situ d'echantillons |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS579159U (ja) |
FR (1) | FR2477769A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2639473A1 (fr) * | 1988-11-18 | 1990-05-25 | Chaixmeca Sarl | Dispositif pour le transfert sous atmosphere controlee d'echantillons destines a l'examen en microscopie electronique en transmission |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3858049A (en) * | 1973-09-17 | 1974-12-31 | Etec Corp | Method and apparatus for sem specimen coating and transfer |
DE2511449A1 (de) * | 1975-03-15 | 1976-09-16 | Leybold Heraeus Gmbh & Co Kg | Probenschleuse |
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1980
- 1980-03-06 FR FR8005037A patent/FR2477769A1/fr active Granted
-
1981
- 1981-03-02 JP JP2893581U patent/JPS579159U/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS579159U (ja) | 1982-01-18 |
FR2477769A1 (fr) | 1981-09-11 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |