FR2476689B1 - - Google Patents
Info
- Publication number
- FR2476689B1 FR2476689B1 FR8004322A FR8004322A FR2476689B1 FR 2476689 B1 FR2476689 B1 FR 2476689B1 FR 8004322 A FR8004322 A FR 8004322A FR 8004322 A FR8004322 A FR 8004322A FR 2476689 B1 FR2476689 B1 FR 2476689B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/063—Sliding boat system
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8004322A FR2476689A1 (fr) | 1980-02-27 | 1980-02-27 | Nacelle utilisable pour des depots epitaxiques en phase liquide et procede de depot mettant en jeu ladite nacelle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8004322A FR2476689A1 (fr) | 1980-02-27 | 1980-02-27 | Nacelle utilisable pour des depots epitaxiques en phase liquide et procede de depot mettant en jeu ladite nacelle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2476689A1 FR2476689A1 (fr) | 1981-08-28 |
| FR2476689B1 true FR2476689B1 (enExample) | 1982-02-26 |
Family
ID=9239048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8004322A Granted FR2476689A1 (fr) | 1980-02-27 | 1980-02-27 | Nacelle utilisable pour des depots epitaxiques en phase liquide et procede de depot mettant en jeu ladite nacelle |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2476689A1 (enExample) |
-
1980
- 1980-02-27 FR FR8004322A patent/FR2476689A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2476689A1 (fr) | 1981-08-28 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CA | Change of address | ||
| CD | Change of name or company name | ||
| ST | Notification of lapse |